Gallium contents-dependent improved behavior of sol–gel-grown Al:Ga co-doped ZnO nanostructures

Al-Asedy, Hayder J.; Ati, Ali A.; Bidin, Noriah; Lee, Siew Ling

doi:10.1007/s00339-017-1271-0

Cited by 7 publications

(1 citation statement)

References 59 publications

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“…The HRTEM results for the corresponding AGZO film show that the individual nanocrystals are highly oriented with perfect lattice spacing. These columnar structures are ZnO for which the (002) plane is parallel to the surface of the substrate …”

Section: Resultsmentioning

confidence: 99%

Fabrication of Al and Ga Co‐Doped ZnO Films on Flexible Substrates and Control Charts Monitor Deposition Process

Lin

2019

Physica Status Solidi (a)

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doped zinc oxide (AGZO) films are deposited onto flexible poly (ethylene terephthalate) (PET) substrates by radio frequency magnetron sputtering. Before the AGZO film coating, oxygen plasma etching is used to modify the surface of the PET substrate. The results show that the substrate is very hydrophilic. This study determines the effect of the deposition parameters on the structural, morphological, and optoelectronic performances of AGZO films. Based on the gray Taguchi analysis for the AGZO film coatings show that the electrical resistivity is decreased to 6.30 Â 10 À3 Ω cm and the optical transmittance is increased to 81.0%. The XRD diffraction and TEM images show that the AGZO films exhibit a hexagonal ZnO wurtzite structure. A comparison of the PET substrates that do or do not undergo plasma pretreatment, shows that the AGZO films coating there is a 4.7% improvement in elastic recovery, a 13.65% improvement in hardness H, a 1.69% improvement in the elastic modulus E, a 12.15% improvement in in H/E, and a 42.06% improvement in H 3 /E 2 . Shewhart control charts are used to monitor the deposition processes for the AGZO films. Finding shown that the deposition parameters for the films and process performance are in control and stable.

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Section: Resultsmentioning

confidence: 99%