2011
DOI: 10.1149/1.3521290
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Galvanic Deposition of Nanoporous Si onto 6061 Al Alloy from Aqueous HF

Abstract: We report galvanic deposition of Si onto 6061 Al alloy from dilute aqueous hydrofluoric acid ͑HF͒ at pH 2.5. The overall reaction involves reduction of SiF 6 2− to Si with simultaneous oxidation and dissolution of Al. The Si film is about 12 m thick after 6 h of deposition. High resolution scanning electron microscopy shows that these Si films are nanoporous, with pore sizes ranging from 3 to 8 nm. The nanoporous Si films oxidize rapidly upon sample emersion. Elemental analysis by energy dispersive X-ray spect… Show more

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Cited by 16 publications
(20 citation statements)
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“…23 Although thick (12 m) Si films could be grown fairly rapidly, these Si deposits contained nanoscale pores ranging in size from 3-8 nm. 23 The nanoporous Si film appeared dark grey in solution, but gradually changed color to light grey and then white upon overnight exposure to laboratory air. This is consistent with the known color change expected with oxidation of Si to SiO 2 .…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…23 Although thick (12 m) Si films could be grown fairly rapidly, these Si deposits contained nanoscale pores ranging in size from 3-8 nm. 23 The nanoporous Si film appeared dark grey in solution, but gradually changed color to light grey and then white upon overnight exposure to laboratory air. This is consistent with the known color change expected with oxidation of Si to SiO 2 .…”
Section: Resultsmentioning
confidence: 99%
“…23 While 12 m thick nanoporous Si films were grown from a mild solution, compact Si films could not be obtained. Here we report electrochemical deposition of thick, compact Si films from HF-containing electrolytes in 80 wt % formic acid (HCO 2 H) by a combination of galvanic and electroless deposition.…”
mentioning
confidence: 99%
“…These results are in contrast to galvanic Si deposition atop Al, which was only successful on Al alloy substrates, not on pure Al. 14,15 Conclusions Galvanic deposition of Mo onto 6061 Al alloy from solutions containing 1 mM HNO 3 , and 10 mM MoCl 5 allows growth of 9 μm thick Mo films after 40 min. of deposition.…”
Section: Methodsmentioning
confidence: 97%
“…The Mo film composition can be compared to that reported recently for a similar process, galvanic deposition of Si onto Al 6061 alloy. 14,15 In both cases, the Mo (Si) deposit contains substantial Al, since the dissolving Al from reaction 2 above must be transported through the growing Mo (Si) film, during which some Al is incorporated.…”
Section: Methodsmentioning
confidence: 99%
“…For virtually all top-down techniques, the porous silicon created is polycrystalline. For some bottom-up techniques such as sputtering/ dealloying (Fukatani et al 2005), electrodeposition (Krishnamurthy et al 2011),…”
Section: Specific Fabrication Techniquesmentioning
confidence: 99%