2023
DOI: 10.3762/bjnano.14.4
|View full text |Cite
|
Sign up to set email alerts
|

Gap-directed chemical lift-off lithographic nanoarchitectonics for arbitrary sub-micrometer patterning

Abstract: We introduce a unique soft lithographic operation that exploits stamp roof collapse-induced gaps to selectively remove an alkanethiol self-assembled monolayer (SAM) on Au to generate surface patterns that are orders of magnitude smaller than structures on the original elastomer stamp. The smallest achieved feature dimension is 5 nm using a micrometer-scale structured stamp in a chemical lift-off lithography (CLL) process. Molecular patterns retained in the gaps between stamp features and their circumscribed or… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
1
0

Year Published

2023
2023
2024
2024

Publication Types

Select...
2

Relationship

0
2

Authors

Journals

citations
Cited by 2 publications
(1 citation statement)
references
References 58 publications
0
1
0
Order By: Relevance
“…Therefore, when building materials from nanoscale units, these uncertainties are included to harmonize the various effects [ 55 56 ]. Recent publications advocating nanoarchitectonics show that it is widely applied in academic fields such as materials synthesis [ 57 59 ], structural control [ 60 63 ], physical phenomena [ 64 66 ], and basic biochemistry [ 67 69 ], as well as in applied fields such as catalysis [ 70 72 ], sensors [ 73 75 ], devices [ 76 78 ], energy [ 79 81 ], environment [ 82 85 ], and medicine [ 86 89 ]. Since all the materials are composed of atoms and molecules, nanoarchitectonics is considered a universal unified concept that can be applied to all targets.…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, when building materials from nanoscale units, these uncertainties are included to harmonize the various effects [ 55 56 ]. Recent publications advocating nanoarchitectonics show that it is widely applied in academic fields such as materials synthesis [ 57 59 ], structural control [ 60 63 ], physical phenomena [ 64 66 ], and basic biochemistry [ 67 69 ], as well as in applied fields such as catalysis [ 70 72 ], sensors [ 73 75 ], devices [ 76 78 ], energy [ 79 81 ], environment [ 82 85 ], and medicine [ 86 89 ]. Since all the materials are composed of atoms and molecules, nanoarchitectonics is considered a universal unified concept that can be applied to all targets.…”
Section: Introductionmentioning
confidence: 99%