1981
DOI: 10.1016/0040-6090(89)90585-3
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Gap optique et indice de réfraction du silicium amorphe hydrogéné à 95 K et 295 K

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Cited by 16 publications
(6 citation statements)
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“…T, = 240" C, 0.1 % B2&:SiH4), the absorption coefficient characteristics in this energy range parallel those of the intrinsic films while the profiles of films deposited at higher T, and doping gas ratios (e.g. T, = 280" C, 1 % B2H6:SiH4) show a large increase.This large increase in the low energy absorption is consistent with earlier reported studies where only high doping ratios (> 1%) were investigated[5,6]. It is important to accurately characterize the absorption coefficients in these materials as this information is necessary to calculate the amount of light entering the intrinsic layer during accurate modelling.…”
supporting
confidence: 88%
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“…T, = 240" C, 0.1 % B2&:SiH4), the absorption coefficient characteristics in this energy range parallel those of the intrinsic films while the profiles of films deposited at higher T, and doping gas ratios (e.g. T, = 280" C, 1 % B2H6:SiH4) show a large increase.This large increase in the low energy absorption is consistent with earlier reported studies where only high doping ratios (> 1%) were investigated[5,6]. It is important to accurately characterize the absorption coefficients in these materials as this information is necessary to calculate the amount of light entering the intrinsic layer during accurate modelling.…”
supporting
confidence: 88%
“…The most striking effect on the optical properties is that the absorption coefficient increases much more rapidly with T, than for undoped a-Si:H. These general trends were observed in previous investigations[5, 6,11], but the results were either cursory, did not focus on the temperature range .where device quality a-Si:H is obtained, or were carried out only at high doping gas ratios (> 1 %). A detailed analysis of the changes in the absorption coefficient with T, and doping gas ratio was carried out with some of the results shown in Fig.…”
Section: Optical Properties Of Boron Doped A4i:hsupporting
confidence: 52%
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“…In This leads us to a study of the determination of hydrogen concentration in these films. We wish to point out here that the experimental det,ails of the preparation of the films and study of their properties have been discussed elsewhere [26].…”
Section: E and Nv Have Been Evaluated Using Expressionsmentioning
confidence: 99%
“…&(O) -13. Applications to a-SkHRecently, we have published[5] results concerning optical properties a t room temperature of amorphous silicon films, prepared by glow discharge decomposition of silane, for temperatures ranging from T, = 350 to 50 "C and then a t different hydrogenconcentrations [ 141.These results about ~( 0 ) -and Edvalues are reported in Table3. From them and from relation (8) %,-values are calculated.…”
mentioning
confidence: 99%