Gas aggregation nanocluster source — Reactive sputter deposition of copper and titanium nanoclusters

Marek, A.; Valter, J.; Kadlec, S.; Vyskočil, Jiří

doi:10.1016/j.surfcoat.2010.12.027

Cited by 63 publications

(32 citation statements)

References 12 publications

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“…Plasma-based production of size-controlled nanoparticles with narrow distributions [16][17][18][19][20] and different shapes 21 has been demonstrated by several authors. The range of materials that can be synthesized by plasma-based gas phase synthesis methods is manifold, as both physical and chemical vapor deposition can be used, and nanoparticles have been made of materials ranging from carbon, 18,22 silicon, [23][24][25] metals, 17,19,21 and oxides 26,27 to nitrides.…”

mentioning

confidence: 99%

Fast growth of nanoparticles in a hollow cathode plasma through orbit motion limited ion collection

Pilch¹,

Söderström²,

Hasan³

et al. 2013

Appl. Phys. Lett.

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mentioning

confidence: 99%

Fast growth of nanoparticles in a hollow cathode plasma through orbit motion limited ion collection

Pilch¹,

Söderström²,

Hasan³

et al. 2013

Appl. Phys. Lett.

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“…As it was reported elsewhere, 21 a high fraction of clusters prepared by plasma sputtering are ionized, and most of them are negatively charged probably due to electron attachment based on Marek's report. 37 In this case, the negatively charged clusters attract the positive Fe ions. Comparing with the high ionization ratio in a high magnetic field where electronic attraction can boost the single atom addition, particle growth following this mode is suppressed with the backing plate present due to the low ionization ratio of the free metal atoms.…”

Section: Resultsmentioning

confidence: 99%

Preparation of tunable-sized iron nanoparticles based on magnetic manipulation in inert gas condensation (IGC)

Xing

Brink

Kooi

et al. 2017

Journal of Applied Physics

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Iron nanoparticles (NPs) prepared by inert gas condensation were studied using high resolution transmission electron microscopy and Wulff construction shape analysis. The NP size and shape show strong dependence on the magnetic field above the target surface. The effect of the magnetic field could be tuned by adjusting the thickness of the protective backing plate positioned in-between the target and the magnetron head. With increasing backing plate thickness, the particle size decreases and the NP morphologies evolve from faceted to close-to-spherical polyhedral shapes. Moreover, with changes in size and shape, the particle structure also varies so that the NPs exhibit: (i) a core-shell structure for the faceted NPs with size ∼15–24 nm; (ii) a core-shell structure for the close-to-spherical NPs with size ∼8–15 nm; and (iii) a fully oxidized uniform structure for NPs with sizes less than ∼8 nm having a void in the center due to the Kirkendall effect. The decrease of NP size with the increasing backing plate thickness can be attributed to a reduced magnetic field strength above the iron target surface combined with a reduced magnetic field confinement. These results pave the way to drastically control the NP size and shape in a simple manner without any other adjustment of the aggregation volume within the deposition system.

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“…For the synthesis of titanium, cobalt [33] and tungsten [37] nanoparticles it has been found to be necessary to have a partial pressure of reactive gas such as oxygen or water vapor in order for particles to nucleate. For the synthesis of copper nanoparticles, oxygen was not found to be necessary, but at certain partial pressures it increased the nanoparticle mass deposition rate [38]. The explanation for this behavior was attributed to the different binding energies between metal-metal dimers and metal-oxygen dimers.…”

Section: Nucleationmentioning

confidence: 98%

“…The explanation becomes further complicated, since most of the growth material is ionized, and oxygen can form negative ions that might play an important role. It has also been suggested that oxide formation on the cathode surface could cause small arcs that eject stable clusters of atoms which can grow to larger particles [38].…”

Section: Nucleationmentioning

confidence: 99%

Titanium oxide nanoparticle production using high power pulsed plasmas

Gunnarsson¹

2016

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This thesis covers fundamental aspects of process control when growing titanium oxide nanoparticles in a reactive sputtering process. It covers the influence of oxygen containing gas on the oxidation state of the cathode from which the growth material is ejected, as well as its influence on the particles oxidation state and their nucleation. It was found that a low degree of reactive gases was necessary for nanoparticles of titanium to nucleate. When the oxygen gas was slightly increased, the nanoparticle yield and particle oxygen content increased. A further increase caused a decrease in particle yield which was attributed to a slight oxidation of the cathode. By varying the oxygen flow to the process, it was possible to control the oxygen content of the nanoparticles without fully oxidizing the cathode. Because oxygen containing gases such as residual water vapour has a profound influence on nanoparticle yield and composition, the deposition source was re-engineered to allow for cleaner and thus more stable synthesis conditions. The size of the nanoparticles has been controlled by two means. The first is to change electrical potentials around the growth zone, which allows for nanoparticle size control in the order of 25-75 nm. This size control does not influence the oxygen content of the nanoparticles. The second means of size control investigated was by increasing the pressure. By doing this, the particle size can be increased from 50 -250 nm, however the oxygen content also increases with pressure. Different particle morphologies were found by changing the pressure. At low pressures, mostly spherical particles with weak facets were produced. As the pressure increased, the particles got a cubic shape. At higher pressures the cubic particles started to get a fractured surface. At the highest pressure investigated, the fractured surface became poly-crystalline, giving a cauliflower shaped morphology.

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Gas aggregation nanocluster source — Reactive sputter deposition of copper and titanium nanoclusters

Cited by 63 publications

References 12 publications

Fast growth of nanoparticles in a hollow cathode plasma through orbit motion limited ion collection

Fast growth of nanoparticles in a hollow cathode plasma through orbit motion limited ion collection

Preparation of tunable-sized iron nanoparticles based on magnetic manipulation in inert gas condensation (IGC)

Titanium oxide nanoparticle production using high power pulsed plasmas

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