2021
DOI: 10.1134/s1061934821030126
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Gas Chromatography–Mass Spectrometry Analysis of High-Purity Volatile Inorganic Hydrides

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Cited by 5 publications
(3 citation statements)
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“…With the rapid development of the national economy, the gas industry, especially high-purity, ultra-high-purity gases, and the electronic gas industry, is also booming [1][2][3] . In various fields, including semiconductor, medical, aerospace, energy, and chemical industries, the demand for various industrial gases is increasing day by day, not only in terms of quantity but also quality, that is, the demand for high-purity gases is more and more [4,5] .…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…With the rapid development of the national economy, the gas industry, especially high-purity, ultra-high-purity gases, and the electronic gas industry, is also booming [1][2][3] . In various fields, including semiconductor, medical, aerospace, energy, and chemical industries, the demand for various industrial gases is increasing day by day, not only in terms of quantity but also quality, that is, the demand for high-purity gases is more and more [4,5] .…”
Section: Introductionmentioning
confidence: 99%
“…With the rapid development of the national economy, the gas industry, especially high-purity, ultra-high-purity gases, and the electronic gas industry, is also booming [1][2][3] . In various fields, including semiconductor, medical, aerospace, energy, and chemical industries, the demand for various industrial gases is increasing day by day, not only in terms of quantity but also quality, that is, the demand for high-purity gases is more and more [4,5] . The detection of trace impurities in gases is a key link in the production of high-purity gases and gases for the electronics industry, and the analysis of trace impurities in these gases has always been a difficult point for chromatographic analysis [6,7] .…”
Section: Introductionmentioning
confidence: 99%
“…One of the important instruments in the field of analytical chemistry is the gas chromatograph mass spectrometer (GC-MS) [1,2]-an instrument that is able to separate, detect and identify many compounds that reside within analyzed samples. The GC vaporizes the compounds, separates them in time and then outputs them into the MS [3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19]. In the common quadrupole based MS [20,21] the molecules are ionized and are then focused by a series of ion-lenses and guided into the quadrupole mass filter, which has a scan like operating procedure: the voltages on its rods, if kept constant, allow only a small range of m/z values to pass and reach the ion detector, while all other ions collide with the rods and neutralize.…”
Section: Introductionmentioning
confidence: 99%