Gas discharge devices generating the directed fluxes of off-electrode plasma

Kazanskiy, Nikolay L.; Kolpakov, V. A.; Подлипнов, В. В.

doi:10.1016/j.vacuum.2013.09.014

Cited by 50 publications

(17 citation statements)

References 9 publications

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“…IPSI RAS has many investigations in counting [23][24][25][26][27][28][29][30][31][32][33][34][35][36] and processing [37][38][39][40][41][42][43][44][45][46][47][48][49][50][51][52][53][54][55] of diffractive optics. IPSI RAS and Laser Center of Hannover have investigated the two photon polymerization technology for processing microdevices such as IOLs [56][57][58].…”

Section: Russian Lensesmentioning

confidence: 99%

Methods for creation of diffractive intraocular lenses

Gornostay¹

2017

Collection of Selected Papers of the III International Conference on Information Technology and Nanotechnology

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Hybrid intraocular lenses (IOLs) are diffractive-refractive lenses with pseudoaccomodation. They can imitate the optical system of health eye more precisely, than other types. These lenses have 2-3 or more stable focuses. I proposed a comparison of hybrid IOLs: their shape, their processing, their aberrations and diffractive efficiency. I showed a review of new methods for correction of chromatism and I proposed a method of using volume holograms. I discussed features of possible materials.

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Section: Russian Lensesmentioning

confidence: 99%

Methods for creation of diffractive intraocular lenses

Gornostay¹

2017

Collection of Selected Papers of the III International Conference on Information Technology and Nanotechnology

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“…In most cases the excitation process warms the supersonic jet, or contaminates it with sputtered electrode material [47][48][49][50][51][52]. We have developed a new type of electrode less Dielectric Barrier Discharge [53][54][55][56] source that does not heat the jet or contaminates it [57]. The source is attached to the front flange of the Even-Lavie valve and uses a built in disk magnet to confine the discharge electrons.…”

Section: Ionic Clusters and Radical Sourcesmentioning

confidence: 99%

“The Even-Lavie valve as a source for high intensity supersonic beam”

Even

2015

EPJ Techn Instrum

123

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“…Fabrication results after each unit process step have been presented and also the SEM images of the final released structure. Technology of computer optics [5][6][7][8][9][10][11][12] is unable to provide the required parameters of MEMSstructures.…”

Section: Fig 1 Solid Model Of the Devicementioning

confidence: 99%

Su-8 Based Uv-Liga Fabrication Process for Realization of Nickel Based Mems Inertial Sensor

Verma

Khan²,

Fomchenkov

et al. 2016

Collection of Selected Papers of the II International Conference on Information Technology and Nanotechnology

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Abstract. This paper reports the complete fabrication process flow based on UV-LIGA technology for realization of metal based MEMS inertial sensor. In this process, nickel is used as the structural layer and copper as the sacrificial layer. The economical three mask process has been optimized and the detailed step by step procedure for carrying out the fabrication is presented. The optimized process parameters to achieve void free copper and nickel electroplated layers with extremely low roughness have been reported. Footing problem associated with lithography process has been analysed and its solution discussed. The fabrication results after each process step have been presented and discussed. Scanning electron micrograph images of the released prototype inertial sensor devices have been presented to demonstrate the successful fabrication of the prototypes using the economical UV-LIGA process. Keywords: MEMS, UV-LIGA, SU-8 2010, Cu and Ni electroplatingCitation: Verma Payal, Zaman Khan K, Fomchenkov SA, Gopal R. SU-8 based UV-LIGA fabrication process for realization of nickel based MEMS inertial sensor.

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Gas discharge devices generating the directed fluxes of off-electrode plasma

Cited by 50 publications

References 9 publications

Methods for creation of diffractive intraocular lenses

Methods for creation of diffractive intraocular lenses

“The Even-Lavie valve as a source for high intensity supersonic beam”

Su-8 Based Uv-Liga Fabrication Process for Realization of Nickel Based Mems Inertial Sensor

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