Gas flow sputtering: Versatile process for the growth of nanopillars, nanoparticles, and epitaxial thin films

Sakuma, Hiroshi; Ishii, Kiyoshi

doi:10.1016/j.jmmm.2008.11.053

Cited by 21 publications

(5 citation statements)

References 11 publications

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“…The EB-DVD method has been used to deposit coatings on several non-line-of-sight (NLS) substrates including fibers, 26 polymer foam templates, 27 and stationary airfoil shaped substrates. 23 A similar capability has been reported for the gas flow sputtering method [28][29][30] using a deposition chamber pressure of 47 Pa, and the PS-PVD method, which operates with chamber pressures in the 100-1000 Pa range. [6][7][8] Vapor condensation onto a nonplanar substrate geometry affects both coating growth behavior during deposition and in-service performance of the ensuing coating.…”

Section: Introductionmentioning

confidence: 57%

Microstructure of vapor deposited coatings on curved substrates

Rodgers

Zhao

Wadley

2015

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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Thermal barrier coating systems consisting of a metallic bond coat and ceramic over layer are widely used to extend the life of gas turbine engine components. They are applied using either high-vacuum physical vapor deposition techniques in which vapor atoms rarely experience scattering collisions during propagation to a substrate, or by gas jet assisted (low-vacuum) vapor deposition techniques that utilize scattering from streamlines to enable non-line-of-sight deposition. Both approaches require substrate motion to coat a substrate of complex shape. Here, direct simulation Monte Carlo and kinetic Monte Carlo simulation methods are combined to simulate the deposition of a nickel coating over the concave and convex surfaces of a model airfoil, and the simulation results are compared with those from experimental depositions. The simulation method successfully predicted variations in coating thickness, columnar growth angle, and porosity during both stationary and substrate rotated deposition. It was then used to investigate a wide range of vapor deposition conditions spanning high-vacuum physical vapor deposition to low-vacuum gas jet assisted vapor deposition. The average coating thickness was found to increase initially with gas pressure reaching a maximum at a chamber pressure of 8-10 Pa, but the best coating thickness uniformity was achieved under high vacuum deposition conditions. However, high vacuum conditions increased the variation in the coatings pore volume fraction over the surface of the airfoil. The simulation approach was combined with an optimization algorithm and used to investigate novel deposition concepts to tailor the local coating thickness. V

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