2024
DOI: 10.3390/ma17051149
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Gas-Phase Fabrication and Photocatalytic Activity of TiO2 and TiO2–CuO Nanoparticulate Thin Films

Meditha Hudandini,
Kusdianto Kusdianto,
Masaru Kubo
et al.

Abstract: CuO-loaded TiO2 nanomaterials have applications in pollutant degradation via photocatalysis. However, the existing methods of fabricating these nanomaterials involve liquid-phase processes, which require several steps and typically generate liquid waste. In this study, TiO2 and TiO2–CuO nanoparticulate thin films were successfully fabricated through a one-step gas-phase approach involving a combination of plasma-enhanced chemical vapor deposition and physical vapor deposition. The resulting films consisted of … Show more

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