Gas Phase Study of Systems for the CVD of Silver

Abstract

Suitable strategies for the deposition of silver require knowledge of the interplay of gas phase and surface chemistry, hence the gas phase of several potential silver(I) precursor systems have been analyzed by molecular beam mass spectrometry. Specifically, the decomposition of silver(I) trifluoroacetate, silver(I) pentafluoropropionate, (trifluoroacetato)bis(tri-n-butylphosphine) silver(I), and (pentafluoropropionato)bis(tri-n-butylphosphine) silver(I) have been investigated under hot-wall CVD conditions. The experiments show that, under the conditions investigated, the silver carboxylates [AgO 2 CR] (R = CF 3 , C 2 F 5 ) are not suitable, while the phosphane-stabilized silver(I) carboxylates [(n-Bu 3 P) 2 AgO 2 CR] (R = CF 3 , C 2 F 5 ) are promising candidates. The thermal stability and potential formation mechanisms of the observed silver-containing fragments are discussed.

CVD with Tri‐nbutylphosphine Silver(I) Complexes: Mass Spectrometric Investigations and Depositions

“…The electron impact ionization took place at a pressure of 10 ±6 mbar at an ionization energy of 30 eV. More details of this set-up can be found in the literature [21].…”

“…The majority of these silver compounds are known to exhibit low stability in the gas phase, and insufficient information is available about the behavior in the gas phase upon evaporation and during deposition. [18,20] In a previous paper, [21] we reported the gas- [13] In this paper we describe a systematic investigation of several trin butylphosphine silver(I) (non-fluorinated) carboxylates, dicarboxylates, phenolates, and b-diketonates.…”

Nonaligned Carbon Nanotubes Anchored on Porous Alumina: Formation, Process Modeling, Gas‐Phase Analysis, and Field‐Emission Properties

“…To study the gas‐phase chemistry during CVD‐based nanotube synthesis, we employed in situ molecular‐beam‐coupled quadrupole mass spectroscopy (MB‐QMS) (Figure 19),39 which is a powerful analytical tool to detect stable and radical gas‐phase species in combustion46–50 or CVD processes 51. 52 Previously we successfully applied MB‐QMS to diamond CVD53 and MOCVD of GaN54, 55 and InN.…”

Trialkoxysilyl‐Functionalized Silver(I) Carboxylates: New Building Blocks for the Synthesis of Immobilizable and Immobilized Homogeneous Catalysts

“…It should be noted that silver(i) carboxylates have been intensively studied for their rich and diverse structural chemistry in the solid state, [15][16][17] and silver(i) complexes with fluorinated carboxylates have previously attracted interest as potential precursors for chemical vapor deposition (CVD) yielding metallic silver layers. [18][19][20] …”