Gas phase study of the reactivity of optical coating materials with hydrocarbons using a desk-top size EUV laser

Abstract

The reactivity of prospective capping layer extreme ultraviolet (EUV) mirror materials with hydrocarbons, alcohols, and water is studied in the gas phase using mass spectroscopy of metal-oxide clusters. We report the results of chemistry studies for Si, Ti, Hf, Zr, and Ru metal oxide nanoclusters in which the reaction products were ionized with little or no fragmentation by 26.5 eV photons from a desk-top size 46.9 nm Ne-like Ar laser. Hf and Zr oxides are found to be much less reactive than Si or Ti oxides in the presence EUV light. Ru oxides show different chemistry and are inactive with water/alcohols, and active with saturated/unsaturated hydrocarbons. The results are relevant to the design of EUV mirror capping layers that are resistant to carbon contamination.

Remarkable Improvement in Hydrogen Sensing Characteristics with Pt/TiO2 Interface Control

“…Moreover, the surface is also found to be contaminated with various species. The carbon contamination (C 1s at approximately 283 eV) of the S1 sample (∼36%) is much higher than that of the S2 sample (∼15%), which is probably due to a photoresist reaction at the surface during development, as TiO 2 is extremely reactive to hydrocarbons . Strikingly, the surface of the S2 sample was characterized by the presence of two Pt 4f peaks with binding energy values of 74.5 and 70.9 eV.…”

“…h i b i t e d .surface during development, as TiO 2 is extremely reactive to hydrocarbons 52. Strikingly, the surface of the S2 sample was characterized by the presence of two Pt 4f peaks with binding energy values of 74.5 and 70.9 eV.…”