Eurosensors 2018 2018
DOI: 10.3390/proceedings2130723
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Gas Sensing Characteristics of a WO3 Thin Film Prepared by a Sol-Gel Method

Abstract: Preparation and characterization of a WO3-based thin film gas sensor are reported. The WO3 film was prepared on a polished alumina substrate by a sol-gel method using an aqueous mixture solution of ammonium metatungstate hydrate and poly-vinyl alcohol, and fabricated into the gas sensor by forming interdigital electrodes on the surface. The characterization was conducted by measuring the electrical resistance change in NO, H2, and NH3 ambient as a function of gas concentration. It is revealed that the sensor h… Show more

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Cited by 5 publications
(3 citation statements)
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“…Although, understanding gas sensing is critical, many researchers are widely accepted empirical models to obtain gas sensing results through a trial-and-error method. Still, the various deposition methods have been used to construct WO 3 thin films with different morphologies such as thermal evaporation (Li et al, 2017), laser beam ablation (Nishijima et al, 2020), molecular beam epitaxy (Li et al, 2015), electron beam evaporation (Madhuri and Babu, 2016), R.F sputtering (Bose et al, 2018), D.C. sputtering (Horprathuma et al, 2013), Sol-gel technique (Yano et al, 2018), Electrodeposition (Mineo et al, 2020), chemical bath (Wang et al, 2020) and spray pyrolysis (Cho et al, 2013). Each method has a set of parameters to control the morphology of WO 3 thin films.…”
Section: Introductionmentioning
confidence: 99%
“…Although, understanding gas sensing is critical, many researchers are widely accepted empirical models to obtain gas sensing results through a trial-and-error method. Still, the various deposition methods have been used to construct WO 3 thin films with different morphologies such as thermal evaporation (Li et al, 2017), laser beam ablation (Nishijima et al, 2020), molecular beam epitaxy (Li et al, 2015), electron beam evaporation (Madhuri and Babu, 2016), R.F sputtering (Bose et al, 2018), D.C. sputtering (Horprathuma et al, 2013), Sol-gel technique (Yano et al, 2018), Electrodeposition (Mineo et al, 2020), chemical bath (Wang et al, 2020) and spray pyrolysis (Cho et al, 2013). Each method has a set of parameters to control the morphology of WO 3 thin films.…”
Section: Introductionmentioning
confidence: 99%
“…In previous reports, AMT aqueous solutions (with added organic/ inorganic acids or surfactants) were hydrothermally treated to generate WO 3 nanopowders, which were processed into pastes for WO 3 electrode fabrication [38][39][40]. Conversely, ultrasonic spray pyrolysis of AMT aqueous solutions [41], and dip-/spin-coating of aqueous sols comprising AMT and polymer additives [42][43][44][45] were employed to deposit WO 3 thin films on various substrates, including glass, fluorine-doped tin oxide (FTO), and polished alumina substrates. Herein, by establishing a modified sol-gel process in which chemically stable AMT was used as the precursor, the above-mentioned challenge related to enhancing the reproducibility of WO 3 photoanodes is circumvented.…”
Section: Introductionmentioning
confidence: 99%
“…Many synthesis routes exist for the fabrication of WO 3 -based gas-sensing elements. Among these, commonly reported pathways include hydrothermal, 21,22 sol-gel, 23,24 sonochemical, 25 physical 12,26 or chemical vapour deposition 27 and electrospinning. 28,29 Typically, the selection of the right synthesis route depends on the desired surface morphology and composition.…”
mentioning
confidence: 99%