“…MoO 3 has been well known for its application as a catalyst for the oxidation of hydrocarbons and reduction of NO x in the chemical and petroleum industry [11][12][13][14]. Efforts were also made to examine and improve the gas sensing properties of MoO 3 based devices to detect H 2 [10,15], CO [15,16], NH 3 [10,12,17], and LPG [10]. Imawan et al [17] studied the RF sputtered MoO 3 thin films for sensing responses to various gases, including CO, CH 4 , SO 2 , NO 2 and NH 3 in the temperature range of 250 • C and 475 • C. They revealed that MoO 3 was highly sensitive to NH 3 at 425 • C and that the gas sensitivity dropped with decreasing film thickness (<300 nm).…”