Gas sensing performance at room temperature of nanogap interdigitated electrodes for detection of acetone at low concentration

Minh, Quyen Nguyen; Tong, Hien D.; Kuijk, Anke; Bent, Franc van de; Beekman, Pepijn; Rijn, C.J.M. van

doi:10.1039/c7ra09441h

Cited by 22 publications

(15 citation statements)

References 34 publications

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“…Sensors based on various transduction mechanisms, such as resistive- [ 1 , 2 , 3 , 4 , 5 , 6 , 7 , 8 , 9 , 10 , 11 , 12 , 13 , 14 ], capacitive- [ 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 , 24 , 25 ], optical- [ 26 , 27 , 28 , 29 ], magnetic- [ 30 ], thermal- [ 31 ], microwave- [ 32 , 33 ], and resonance-based [ 34 , 35 , 36 , 37 , 38 , 39 ] techniques, have been applied for detecting a target analyte. Among these sensors, interdigitated electrode (IDE) capacitors and quartz crystal microbalances (QCMs) are the most used because of their small size, low cost, and high sensitivity.…”

Section: Introductionmentioning

confidence: 99%

A Comparative Study of Interdigitated Electrode and Quartz Crystal Microbalance Transduction Techniques for Metal–Organic Framework-Based Acetone Sensors

Chappanda

Tchalala

Shekhah

et al. 2018

Sensors

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We present a comparative study of two types of sensor with different transduction techniques but coated with the same sensing material to determine the effect of the transduction mechanism on the sensing performance of sensing a target analyte. For this purpose, interdigitated electrode (IDE)-based capacitors and quartz crystal microbalance (QCM)-based resonators were coated with a zeolitic–imidazolate framework (ZIF-8) metal–organic framework thin films as the sensing material and applied to the sensing of the volatile organic compound acetone. Cyclic immersion in methanolic precursor solutions technique was used for depositing the ZIF-8 thin films. The sensors were exposed to various acetone concentrations ranging from 5.3 to 26.5 vol % in N2 and characterized/compared for their sensitivity, hysteresis, long-term and short-term stability, selectivity, detection limit, and effect of temperature. Furthermore, the IDE substrates were used for resistive transduction and compared using capacitive transduction.

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Section: Introductionmentioning

confidence: 99%

A Comparative Study of Interdigitated Electrode and Quartz Crystal Microbalance Transduction Techniques for Metal–Organic Framework-Based Acetone Sensors

Chappanda

Tchalala

Shekhah

et al. 2018

Sensors

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“…For instance, it is feasible to make a minor variation of permittivity detectable by decreasing the d distance so that sensitivity can be increased accordingly. [ 84 ] IDEs with nanogaps may not apply to the above equations. Still, they can make the best use of the highest electric fields adjacent to the protruding parts/edges of IDEs, thus contributing mostly to the measured capacitance system.…”

Section: Mof‐based Devices For Gas Sensingmentioning

confidence: 99%

Metal‐Organic Framework Based Gas Sensors

et al. 2021

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The ever-increasing concerns over indoor/outdoor air quality, industrial gas leakage, food freshness, and medical diagnosis require miniaturized gas sensors with excellent sensitivity, selectivity, stability, low power consumption, cost-effectiveness, and long lifetime. Metal-organic frameworks (MOFs), featuring structural diversity, large specific surface area, controllable pore size/geometry, and host-guest interactions, hold great promises for fabricating various MOF-based devices for diverse applications including gas sensing. Tremendous progress has been made in the past decade on the fabrication of MOF-based sensors with elevated sensitivity and selectivity toward various analytes due to their preconcentrating and molecule-sieving effects. Although several reviews have recently summarized different aspects of this field, a comprehensive review focusing on MOF-based gas sensors is absent. In this review, the latest advance of MOF-based gas sensors relying on different transduction mechanisms, for example, chemiresistive, capacitive/impedimetric, field-effect transistor or Kelvin probe-based, mass-sensitive, and optical ones are comprehensively summarized. The latest progress for making large-area MOF films essential to the mass-production of relevant gas sensors is also included. The structural and compositional features of MOFs are intentionally correlated with the sensing performance. Challenges and opportunities for the further development and practical applications of MOF-based gas sensors are also given.

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“…48 The results obtainable with the NGSs proposed in this work are very interesting and promising when compared with some similar results published in literature related to the detection of ethanol or acetone with MOX sensors, where gas concentrations are about 1 order of magnitude higher or the working temperature is higher than 200 °C. 22,49 ■ CONCLUSIONS The present work was primarily focused on the investigation of the disruptive impact of the nanogap electrodes effect onto MOX sensor array sensing properties at 50 and 100 °C for acetone and ethanol. Electron beam and UV optical lithography were successfully combined into a full wafer-level fabrication process on 4″ (100) Si/SiO 2 wafer to develop nanogap sensors for gas sensing applications at low operating temperature (≤100 °C).…”

Section: ■ Experimental Detailsmentioning

confidence: 99%

“…20,21 Nanogap devices also represent a promising approach to ensure high sensitivity, fast response, and minimum power consumption in room or near room-temperature gas sensing applications. 22,23 Several theoretical models tried to explain the effect of the R i /R gb ratio between gas response related to electrode-material interface (R i ) and gas response related to grain boundary interface (R gb ) on the sensitivity of MOX sensors toward some gases. Present work assumes the gas response (R), the ratio between the resistance of the sensing film in dry air (R air ), and the resistance in the presence of the investigated gas (R gas ).…”

Section: ■ Introductionmentioning

confidence: 99%

Nanogap Sensors Decorated with SnO₂ Nanoparticles Enable Low-Temperature Detection of Volatile Organic Compounds

Francioso

Pascali

Cretı̀

et al. 2020

ACS Appl. Nano Mater.

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In this work, an experiment was carried out in order to exploit the physical properties of an electrode structure with nanometric gap to enable the operation of MOX sensors at low temperature independently from the gas sensing properties of the adopted active material. The 100 nm-gap fingers gas sensor array was fabricated by using electron beam and UV optical lithography onto 4″ silicon wafers (guaranteeing high process yield). SnO2 nanoparticles (NPs) synthesized by sol–gel/solvothermal method were trapped between the nanogap electrodes by dielectrophoresis, and scanning electron microscopy and atomic force microscopy surface analysis were used to investigate the semiconducting NPs dispersion between the nanogap fingers. Nanogap SnO2 NPs based-sensor responses to acetone and ethanol in dry air carrier gas at near room temperatures were reported, discussed, and compared with those obtained from 5 μm gap gas sensors (comparable to standard microgap commonly used in commercial sensors) functionalized with the same sensing material. The nanogap sensors exhibited better performance compared to the microgap ones, and larger response to ethanol than to acetone. For the lowest investigated gas concentration (10 ppm), the ethanol response (R air/R gas) increased with temperature from 2.56 at 50 °C to 17.91 to 100 °C, respectively from 1.56 to 3.92 for acetone. The best nanogap sensor responses were found at 100 °C with R air/R gas ≈ 38 for 150 ppm of ethanol, and R air/R gas ≈ 10 for 150 ppm of acetone. The experimental measurements confirmed the adopted theoretical model correlation between the sensor responses and the electrodes separation gap.

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Gas sensing performance at room temperature of nanogap interdigitated electrodes for detection of acetone at low concentration

Abstract: A facile approach for the fabrication of large-scale interdigitated nanogap electrodes (nanogap IDEs) with a controllable gap was demonstrated with conventional micro-fabrication technology to develop chemocapacitors for gas sensing applications.

Cited by 22 publications

References 34 publications

A Comparative Study of Interdigitated Electrode and Quartz Crystal Microbalance Transduction Techniques for Metal–Organic Framework-Based Acetone Sensors

A Comparative Study of Interdigitated Electrode and Quartz Crystal Microbalance Transduction Techniques for Metal–Organic Framework-Based Acetone Sensors

Metal‐Organic Framework Based Gas Sensors

Nanogap Sensors Decorated with SnO₂ Nanoparticles Enable Low-Temperature Detection of Volatile Organic Compounds

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Gas sensing performance at room temperature of nanogap interdigitated electrodes for detection of acetone at low concentration

Abstract: A facile approach for the fabrication of large-scale interdigitated nanogap electrodes (nanogap IDEs) with a controllable gap was demonstrated with conventional micro-fabrication technology to develop chemocapacitors for gas sensing applications.

Cited by 22 publications

References 34 publications

A Comparative Study of Interdigitated Electrode and Quartz Crystal Microbalance Transduction Techniques for Metal–Organic Framework-Based Acetone Sensors

A Comparative Study of Interdigitated Electrode and Quartz Crystal Microbalance Transduction Techniques for Metal–Organic Framework-Based Acetone Sensors

Metal‐Organic Framework Based Gas Sensors

Nanogap Sensors Decorated with SnO2 Nanoparticles Enable Low-Temperature Detection of Volatile Organic Compounds

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Nanogap Sensors Decorated with SnO₂ Nanoparticles Enable Low-Temperature Detection of Volatile Organic Compounds