Gas sensing using polymer-functionalized deformable Fabry–Perot interferometers

St-Gelais, Raphaël; Mackey, Gillian; Saunders, John E.; Zhou, Jialiang; Leblanc-Hotte, Antoine; Poulin, Alexandre; Barnes, Jack A.; Loock, Hans‐Peter; Brown, R. Stephen; Peter, Yves-Alain

doi:10.1016/j.snb.2013.02.016

Cited by 46 publications

(24 citation statements)

References 25 publications

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“…An FPI sensor with polyaniline and Nafion layers deposited on the face of sensor head was fabricated and used as an ammonia gas sensor [22,42]. A vapor-sensitive polymer layer and a silver layer are deposited in sequence on the fiber endface to construct an optical fiber FPI gas sensor.…”

Section: Sensing Applications Of Fabry-perot Interferometersmentioning

confidence: 99%

Chronology of Fabry-Perot Interferometer Fiber-Optic Sensors and Their Applications: A Review

Islam

Ali

Lai

et al. 2014

Sensors

340

141

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Optical fibers have been involved in the area of sensing applications for more than four decades. Moreover, interferometric optical fiber sensors have attracted broad interest for their prospective applications in sensing temperature, refractive index, strain measurement, pressure, acoustic wave, vibration, magnetic field, and voltage. During this time, numerous types of interferometers have been developed such as Fabry-Perot, Michelson, Mach-Zehnder, Sagnac Fiber, and Common-path interferometers. Fabry-Perot interferometer (FPI) fiber-optic sensors have been extensively investigated for their exceedingly effective, simple fabrication as well as low cost aspects. In this study, a wide variety of FPI sensors are reviewed in terms of fabrication methods, principle of operation and their sensing applications. The chronology of the development of FPI sensors and their implementation in various applications are discussed.

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Section: Sensing Applications Of Fabry-perot Interferometersmentioning

confidence: 99%

Chronology of Fabry-Perot Interferometer Fiber-Optic Sensors and Their Applications: A Review

Islam

Ali

Lai

et al. 2014

Sensors

340

141

View full text Add to dashboard Cite

show abstract

“…In the experiment used to estimate resolution, the average power of the DC measurement was 1.41 mW with a standard deviation of 0.16 μW, or 0.01%. If we take the sensor's resolution to be three times the standard deviation, we get a 0.03% fluctuation [30]. This is a percentage of reflected power, not R. However, we use it as an approximation of R to estimate resolution.…”

Section: G Resolutionmentioning

confidence: 99%

Single-Crystal Silicon Photonic-Crystal Fiber-Tip Pressure Sensors

Jan

Solgaard

2015

J. Microelectromech. Syst.

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The combination of high-mechanical flexibility and high-optical reflectivity makes planar photonic crystal diaphragms excellent mirrors for optical resonators used in fiber-optic pressure sensing. We have developed a standard silicon process to construct a monolithic photonic crystal-based crystalline silicon membrane. We report on three photonic crystal pressure sensors with different compliances, and discuss the following figures of merit: 1) spectral shift sensitivity; 2) optical sensitivity; 3) pressure sensitivity; 4) resolution; and 5) dynamic range. When compared with a sensor made with an oxide diaphragm, each of our sensors is at least an order of magnitude more sensitive, with a spectral shift sensitivity magnitude of up to 8.6 nm/kPa. We show that the fabrication can be tailored to optimize figures of merit depending on the needs of the application.[ 2014-0151]Index Terms-Pressure sensor, Fabry-Pérot, fiber optic sensing, photonic crystal diaphragm.

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“…Several groups deployed silicon FP cavities as chemical sensor [87], gas sensor [88] or as refractometer for liquids [18] and single cells [89]. These developed prototypes are based, mainly, on on-chip optical measurement of an analyte.…”

Section: B Complex Refractometer-michelson As Optofluidic Probementioning

confidence: 99%

Beyond Interferometers Based on Silicon-Air Bragg Reflectors: Toward On-Chip Optical Microinstruments—A Review

Malak

2015

IEEE J. Select. Topics Quantum Electron.

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In this paper, we review recent advances in optical microinstruments based on distributed Bragg reflectors (DBR) focusing mainly on two application areas: spectrometry and profilometry. For spectrometry applications, we consider state-of-theart architectures. Among these are novel architectures of high-Q Fabry-Perot resonators based on cylindrical surfaces. In addition, we consider a microelectromechanical Michelson interferometer based on a robust (silicon-air) beam splitting interface. Its measurement principle relies on recording the spatial interferogram using movable mirror followed by inverse Fast Fourier transform (iFFT) to deduce the spectral content of the tested sample. For profilometry applications instead, an elaborated Michelson interferometer based on planar DBR is deployed for profile measurements using the technique of wavelength sweep and FFT to extract the dimensional characteristics. In the last section, we revisit the applications of DBR structures in optofluidics wherein a curved FP cavity has been deployed for optical trapping and binding of microparticles. Besides, a Michelson-based optofluidic probe has been deployed for off-chip measurements of fluid refractive index and absorbance. Globally, DBR based microinstruments demonstrate a strong potential in the targeted application areas.

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Gas sensing using polymer-functionalized deformable Fabry–Perot interferometers

Cited by 46 publications

References 25 publications

Chronology of Fabry-Perot Interferometer Fiber-Optic Sensors and Their Applications: A Review

Chronology of Fabry-Perot Interferometer Fiber-Optic Sensors and Their Applications: A Review

Single-Crystal Silicon Photonic-Crystal Fiber-Tip Pressure Sensors

Beyond Interferometers Based on Silicon-Air Bragg Reflectors: Toward On-Chip Optical Microinstruments—A Review

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