Gas-Sensitive Field-Effect Transistor Incorporating Polymer Layer and Porous Metal Electrode in the Gate Structure

Abstract

Keywords: gas-sensitive FET, FET-based sensor, porous gate electrode, stationary phase, volatile organic compound sensing Field-effect transistor (FET)-based sensors have attractive potential for use in fabricating miniaturized sensor arrays by semiconductor processes. In this work, a gas-sensitive FET incorporating a polyethylene glycol (PEG) film and porous Pt electrode in the gate structure is proposed. In this new type of gas-sensitive FET, the PEG layer provides a dielectric layer (i.e., a stationary phase) that interacts with gaseous molecules, while the porous Pt gate electrode allows gaseous molecules to effectively access the PEG layer. Features of the response pattern, such as peak height, recovery time, and peak shape, unique to the PEG-modified FET sensor were observed when exposed to vapor of volatile organic compounds (VOCs). The sensing mechanism of the gas-sensitive FET is discussed in terms of capacitance changes of the gate structure induced by gaseous molecule adsorption onto the stationary phase. A variety of polymeric materials might be used to modify the gate, and the proposed structure shows promise as a platform for cross-reactive FET-based gas sensor arrays for pattern recognition.

Gas Sensor Array with Polymer-Carbon Glue Composite Structures for Neural Network Application

“…In addition to excellent adaptability with microstructure sensors, membrane sensors can also enhance the adsorption and desorption capabilities of aerosols, improving sensor sensitivity and rapid reuse capabilities. (5) The conductive carbon glue and polymer stacked sensor used in this study are simple to operate, and the solution drop-casting process can be used to easily control the quality of the sensing membrane. Carbon structural materials have unique physical properties, such as excellent corrosion resistance and outstanding electronic conductivity.…”