2007
DOI: 10.1016/j.tsf.2007.03.033
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Gas sensor applications of porous Si layers

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Cited by 62 publications
(29 citation statements)
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“…It was found from the literature that Pd modification is very effective to reduce the operating temperature and to achieve a high response of a gas sensor. Depending on the factors like grain size, porosity and the thickness of the thin film, porous silicon can appreciably be used as a gas sensor operating at low temperature (Mizsei, 2007). Improved gas response behaviour of a palladium doped porous silicon based hydrogen sensor was reported by Polishchuk et al (Polishchuk et al 1998).…”
Section: Effect Of Noble Metal Dispersion On the Surface Of Porous Simentioning
confidence: 99%
“…It was found from the literature that Pd modification is very effective to reduce the operating temperature and to achieve a high response of a gas sensor. Depending on the factors like grain size, porosity and the thickness of the thin film, porous silicon can appreciably be used as a gas sensor operating at low temperature (Mizsei, 2007). Improved gas response behaviour of a palladium doped porous silicon based hydrogen sensor was reported by Polishchuk et al (Polishchuk et al 1998).…”
Section: Effect Of Noble Metal Dispersion On the Surface Of Porous Simentioning
confidence: 99%
“…These different forms of PSi have distinctly different physical properties, and their characteristics may vary during ageing due to oxidation and hydroxylation processes. [48] With this in mind, we examine the Si L 2,3 XES spectra of LPSi and HPSi. As shown in Figure 2, the Si L 2,3 XES spectrum of LPSi is almost the same as that of bulk crystalline Si (c-Si), whereas the Si L 2,3 XES spectrum of HPSi is the almost same as the spectrum of SiO 2 .…”
Section: Resultsmentioning
confidence: 99%
“…Films made of porous silicon have found their own application in sensor technologies (Mizsei 2007 ; ). Here we will concentrate on the properties of silicon nanocrystals, which can be presented as a new version of quantum dots.…”
Section: Porous Silicon and Silicon Nanoparticlesmentioning
confidence: 99%