The thermal unimolecular decomposition of hexamethyldisilane (HMDS), MesSiSiMes, has been investigated over the temperature range 893-1248 K by using the technique of very-low-pressure pyrolysis (VLPP). The major primary reaction pathway is the expected S i S i bond fission to form the trimethylsilyl radical, Me3Si. A minor primary reaction pathway is S1-C bond fission but this accounts for <5% of the HMDS decomposition. RRKM calculations yield the extrapolated high-pressure rate parameters at 1000 K given by the expressions kl,, = 1016-5M.3 exp(-314.3 f 8.0 kJ mok1/R7') s-l for S i S i fission and ka,, EC: 1017.3 exp(-352 kJ mol-l/RT) for S i 4 fission. The A factor for reaction 1 was assigned from the reaction thermochemistry combined with recent measurements of the Me3Si recombination rate and the intrinsic A factor for reaction 6 was chosen to be the same. The rate parameters for S i S i fission lead to the bond dissociation enthalpy DH03~(Me3Si-SiMe3) = 332 f 12 kJ mol-'. This value, combined with a recent reaction-solution calorimetric measurement of -303.7 f 5.5 kJ mol-' for Mf03~(Me3SiSiMe3) leads to AHfo3m(Me3Si) = 14 f 7 kJ mol-l. Observed secondary molecular products of HMDS decomposition under VLPP conditions are CH4, C2H2, and CzH4.Their formations are consistent with known or plausible reactions initiated by partial unimolecular decomposition of Me3Si radicals under reaction conditions.