2016 American Control Conference (ACC) 2016
DOI: 10.1109/acc.2016.7525416
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Gaussian Time Error: A new index for fault detection in semiconductor processes

Julien Marino
1
,
Francesco Rossi
2
,
Mustapha Ouladsine
3
et al.
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Cited by 2 publications
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A Comparative Evaluation of Deep Learning Anomaly Detection Techniques on Semiconductor Multivariate Time Series Data

Tchatchoua
1
,
Graton
2
,
Ouladsine
3
et al. 2021
2021 IEEE 17th International Conference on Automation Science and Engineering (CASE)
8
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A Comparative Evaluation of Deep Learning Anomaly Detection Techniques on Semiconductor Multivariate Time Series Data

Tchatchoua
1
,
Graton
2
,
Ouladsine
3
et al. 2021
2021 IEEE 17th International Conference on Automation Science and Engineering (CASE)
8
0
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0
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1D ResNet for Fault Detection and Classification on Sensor Data in Semiconductor Manufacturing

Tchatchoua
1
,
Graton
2
,
Ouladsine
3
et al. 2022
2022 International Conference on Control, Automation and Diagnosis (ICCAD)
9
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