A tunable structural engineering of nanowires based on template-assisted alloying and phase segregation processes is demonstrated. The Au-Ge system, which has a low eutectic temperature and negligible solid solubility (<10 -3 atom %) of Au in Ge at low temperatures, is utilized. Depending on the Au concentration of the initial nanowires, final structures ranging from nearly periodic nanodisk patterns to core/shell and fully alloyed nanowires are produced. The formation mechanisms are discussed in detail and characterized by in situ transmission electron microscopy and energy-dispersive spectrometry analyses. Electrical measurements illustrate the metallic and semiconducting characteristics of the fully alloyed and alternating Au/Ge nanodisk structures, respectively. KEYWORDS Phase segregation, nanowires, nanoscale diffusion, supercooling T he ability to control the size, structure, composition, and morphology of nanowires (NWs) presents an ideal platform for elucidating nanoscale phenomena while exploring a wide range of potential technological applications. 1 In the past, researchers have demonstrated the synthesis of NW materials with tailored composition by altering the precursors during the growth process, for instance, resulting in superlattice structures with unique electrical and optical properties. 2 Here, we present a different approach, involving the postgrowth engineering of the NW structure and composition through the alloying and phase segregation of binary compounds induced by thermal annealing. As an example, we utilized the Au-Ge system which has a low eutectic temperature (361°C) with negligible Au solid solubility (<10 -3 atom %) in Ge at room temperature. 3 In this approach, Ge/Au core/shell NWs with a HfO 2 capping layer are first prepared and then thermally annealed during which a wide range of nanostructures are controllably formed depending on the initial Au content and the annealing conditions. This approach presents a novel route for controlling the NW composition and structure with potential implications for applications in phase change memory, optoelectronic, and electronic nanodevices.The overall concept of this structural nanoengineering process is schematically illustrated in Figure 1. Ge NWs are first synthesized by the vapor-liquid-solid process as previously reported elsewhere 4 with diameters d ) 50-60 nm ( Figure 1a). Next, a Au layer is sputtered on the surface of the Ge NW arrays with thickness of t Au ) 2-15 nm ( Figure 1b). The thickness of the sputtered Au layer determines the overall Au:Ge atomic ratio of the NWs (see Figure S1 in Supporting Information). The NWs are then capped with ∼10 nm thick HfO 2 deposited by atomic layer deposition pubs.acs.org/NanoLett