General Feature Profile Simulator FPS-3D

Abstract

FPS-3D is a Monte Carlo code designed for simulation of 2D and 3D feature profile evolution. The Monte Carlo particles, launched in correspondence with specified fluxes, interact with solid materials of the target. Each particle typically consists of many gas molecules, or ions, or electrons. A cellular model is used for presenting solid materials. FPS-3D is a general code in a sense that it can be applied to any geometry, any materials, any fluxes, and any set of reactions. All properties of materials and all reactions are specified separately in the chemistry file, while geometry, fluxes, and other parameters are specified in the input file and, if necessary, in the flux file. Predictive capability of FPS-3D comes from its ability to produce results in agreement with experiments for a wide range of conditions while using the same chemistry file. A case of Si and SiO2 etching in Cl/Ar-plasma is used for the demonstration.

Feature Profile 2D and 3D Simulation with Etching, Deposition, and Implantation Processes

“…We were able to design the reactions and obtain good agreement with experimental data for the case of Si etching by Ar+/Cl/Cl2 chemistry (4)(5). However, this is not a typical situation.…”

“…The FPS3D (feature profile simulator for 3D geometries) code was previously presented in a few conferences and journal publications (1)(2)(3)(4)(5). It is gradually developing to include more physical and chemical effects, to optimize for the speed and accuracy of calculations, to expand diagnostics, and to make adjustments for consideration of more difficult cases.…”

Feature Profile 2D and 3D Simulation with Etching, Deposition and Implantation Processes

“…Here, we report on the progress in the feature profile simulator, FPS-3D [1][2]. It is a very general code in a sense that it provides the convenient environment for simulation of any set of materials, any set of fluxes, and any set of surface or volume reactions.…”