General Vacuum Techniques

Abstract

In this article we discuss the procedures and equipment used to maintain a vacuum system at pressures in the range from 10 −3 to 10 −11 torr are discussed. Total and partial pressure gauges used in this range are also described. Because there is a wide variety of equipment, each of the various components is described, including details of their principles and technique of operation, as well as their recommended uses. SI units are not used here. The American Vacuum Society attempted their introduction many years ago, but the more traditional units continue to dominate in this field in North America. Usage is consistent with that generally found in the current literature. The most difficult step in designing and building a vacuum system is defining precisely the conditions required to fulfill the purpose at hand. Important factors to consider are included. Pumps play an important roll in a vacuum system. Details on pumps for the operation of most vacuume systems are given. Leak detection is addressed.