Generation and enhancement of surface acoustic waves on a highly doped p-type GaAs substrate

Dong, Boqun; Zaghloul, Mona

doi:10.1039/c9na00281b

Cited by 9 publications

(3 citation statements)

References 30 publications

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“…The 'Aperture' (A) is finger overlap length of the IDT structure. The finger width of the IDT is denoted by W. Generally, the wavelength of the SAW device equals four times the width 'W' of the IDT structure (λ = 4 W) [20].…”

Section: Design Of Saw Devicementioning

confidence: 99%

Design optimization of surface acoustic wave devices and investigation of fabricated devices under temperature, humidity and steam environments

Anbalagan,

Lakshminarayanan,

Girija

2024

Phys. Scr.

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Surface Acoustic Wave (SAW) technique is one of the most promising Micro Electro Mechanical Systems (MEMS) based detection methods for a variety of applications. SAW sensor is based on the modulation of Rayleigh waves that travel near the surface of a piezoelectric substrate. Advent of MEMS technology has led to the development of SAW sensors which are widely used in chemical sensing, medical, industrial, telecommunication and biological applications. The main focus of this paper is to devise and characterize a generic SAW structure and study the acoustic properties at various environmental conditions before depositing the sensing layer/analyte for any particular application. In this work, a SAW device was designed using COMSOL Multiphysics for a resonant frequency of 100 MHz with 40 µm wavelength on Lithium Niobate (LiNbO3) piezoelectric substrate. The optimized device structure was fabricated using thin film deposition and UV photolithography. The resonant frequency of the fabricated device (97.63 MHz) matched closely with the simulation results (100 MHz) and theoretical results (100 MHz). The device was subjected to various environmental conditions to study the influence on the resonant frequency. The SAW structure showed a resonant frequency shift of 90 KHz in steam environment, ~ 1MHz when heated to 150°C and ~120 KHz when exposed to 80% RH. The device exhibited a linear shift in resonant frequency under all tested environmental conditions with a consistent baseline and good repeatability.

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Section: Design Of Saw Devicementioning

confidence: 99%

Design optimization of surface acoustic wave devices and investigation of fabricated devices under temperature, humidity and steam environments

Anbalagan,

Lakshminarayanan,

Girija

2024

Phys. Scr.

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“…The piezoelectric effect was first discovered by Pierre Curie and Jacques in the 1880s [ 1 ]. This effect describes the conversion of mechanical energy into electrical energy and vice versa [ 2 , 3 ]. Piezoelectric materials are available in natural form and can also be artificially synthesized.…”

Section: Introductionmentioning

confidence: 99%

Changes in Permittivity of the Piezoelectric Material PVDF as Functions of the Electrical Field and Temperature

Zhou

Zaghloul

2021

Materials

Self Cite

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Polyvinylidene Fluoride (PVDF) is becoming a widely used piezoelectric material because of its flexibility, low cost, light weight, and biocompatibility. Its electronic properties, such as its permittivity, can be affected by material crystal structure variations, which also greatly impact the material’s application. It is known that external stress and electrical fields can alter the crystal structure of piezoelectric material. In this research, we aim to investigate the relationship between the external electrical field and the permittivity property of PVDF material. The basic standard equations, finite element analysis, and experimental measurement are included in this paper. By using sweeping voltages from −25 V to +25 V using an Agilent Technologies B1500A Semiconductor Device Analyzer, an increase in the permittivity of the PVDF material is observed. In this work, the study of the permittivity change under the application of different electrical fields at room temperature is presented, and the application of the electrical field under different temperatures is also studied and presented.

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“…The authors of [5][6][7][8] investigated the strain-resistant properties of GaAs crystals. The anomalous piezoelectric effect in GaAs nanowires was detected with the piezoelectric strain coefficient that is 12 times larger than the theoretically estimated value [7], which was explained by the dominant content of the phase with the wurtzite-type crystal structure and increased pressing forces from the contact layer.…”

Section: Introductionmentioning

confidence: 99%

Strain gages based on gallium arsenide whiskers

Druzhinin¹,

Kutrakov²,

Ostrovskii³

et al. 2021

ICTEE

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Strain-resistant properties of GaAs whiskers and ribbons of p- and n-type conductivity with various length (0.3–7 mm) and diameter (10–40 μm) have been investigated in a wide range of temperatures. Strain gages based on heavily doped p-type conductivity GaAs whiskers have linear deformation characteristics and a weak temperature dependence of strain sensitivity in the temperature range from –20 to +3500 °C. The temperature coefficient of resistance (TСR) of not fixed strain gages is about +(0.12–0.16)% × grad–1. The temperature coefficient of strain sensitivity is –0.03 % × deg–1 in the temperature range –120+800 °C. Strain gages based on n-type GaAs ribbons are characterized by high flexibility and high strain sensitivity. They are capable up to +4000 °C and can be used to measure deformations on curved surfaces at high temperatures. TСR of not fixed strain gages is –0.01 +0.03 % × grad–1. The temperature coefficient of strain sensitivity is –0.16% × deg–1 in the temperature range –120 ... +4000 °С.

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Generation and enhancement of surface acoustic waves on a highly doped p-type GaAs substrate

Abstract: Enhancement of SAWs propagating along the surface of a highly doped p-type GaAs substrate is achieved using a ZnO/SiO2 island.

Cited by 9 publications

References 30 publications

Design optimization of surface acoustic wave devices and investigation of fabricated devices under temperature, humidity and steam environments

Design optimization of surface acoustic wave devices and investigation of fabricated devices under temperature, humidity and steam environments

Changes in Permittivity of the Piezoelectric Material PVDF as Functions of the Electrical Field and Temperature

Strain gages based on gallium arsenide whiskers

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