Generation of nanometer displacement using reduction mechanism consisting of torsional leaf spring hinges

Hayashi, Masato; Fukuda, Makoto

doi:10.1007/s12541-012-0088-1

Cited by 12 publications

(6 citation statements)

References 8 publications

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“…Therefore, the new flexure guides, which have a large working range and nano-resolution, have become very important in recent years. For example, a parallel leaf spring flexure has been presented with increasing displacement [1]; a displacement reduction mechanism based on torsional leaf spring hinges has been developed [2]; a novel flexure-based leaf spring has been presented with a large range (25 × 25) μm 2 [3]; a mechanism for a single-axis flexure-based nano-positioning stage with a large range of motion (up to a millimetre) is described in [4]; a multi-axis positioning system with nanometric resolution over a 1 mm stroke is described in [5]; a novel flexure parallel-kinematics precision positioning stage with a centimetre range has been designed and developed [6], and many hinge flexure guides have been reported [7] to [11]. In comparison with a hinge, the leaf spring has a smaller size and a minimum use of materials for the same displacement.…”

Section: Introductionmentioning

confidence: 99%

“…Many studies in recent years have focused on using leaf springs in precision guided machines [1], [2] and [12] to [16]. The bending deflections and stresses of a cantilevered single-leaf flexure using higher-order beam theory were investigated [13]; a one DoF rotational flexure joint using a leaf spring has been proposed [14]; the bending displacement of a single-bent leaf flexure under transverse load has been analysed [15], and a leaf spring has been designed in combination with a hinge [2] and [16]. Even though the double-bent leaf flexure can create a larger range of travel than a single-bent leaf flexure, much research has not been reported.…”

Section: Introductionmentioning

confidence: 99%

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Angle of Twist of a Double-Bent Leaf Flexure under Torsion

2018

SV-JME

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310 INTRODUCTIONLeaf springs and hinges are two kinds of flexure guide; they have many applications in precision machines, especially in nanoelectromechanical systems (NEMs) and microelectromechanical systems (MEMs). These flexure guides have outstanding advantages such as a lack of friction, and their guiding resolution is on the order of a nanometre. However, they have a short working range (from micrometre to millimetre). Therefore, the new flexure guides, which have a large working range and nano-resolution, have become very important in recent years. For example, a parallel leaf spring flexure has been presented with increasing displacement [1]; a displacement reduction mechanism based on torsional leaf spring hinges has been developed [2]; a novel flexure-based leaf spring has been presented with a large range (25 × 25) μm 2 [3]; a mechanism for a single-axis flexure-based nano-positioning stage with a large range of motion (up to a millimetre) is described in [4]; a multi-axis positioning system with nanometric resolution over a 1 mm stroke is described in [5]; a novel flexure parallel-kinematics precision positioning stage with a centimetre range has been designed and developed [6], and many hinge flexure guides have been reported [7] to [11]. In comparison with a hinge, the leaf spring has a smaller size and a minimum use of materials for the same displacement. Thus, we examined leaf spring flexure guides for the large range travel in this study.In general, a leaf spring can be divided into three types: single, single-bent, and double-bent leaf [12]. The single leaf has two degrees of freedom (DoF)

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Angle of Twist of a Double-Bent Leaf Flexure under Torsion

2018

SV-JME

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“…New flexure guide which has large working range and nanoresolution is hot topic in the recent years. Several types of flexure guides have been described in the literature including hinge flexures [2][3][4][5][6][7] and leaf-spring flexures [8][9][10][11][12][13]. A single-bent leaf flexure, investigated in this study, is an L-shaped leaf-spring mechanism.…”

Section: Introductionmentioning

confidence: 99%

Compliance Matrix of a Single-Bent Leaf Flexure for a Modal Analysis

Nguyen

Lee

Kim

et al. 2015

Shock and Vibration

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We present a compliance matrix for a single-bent leaf flexure (SBLF) that shows the relationships between the deformations and the six-axis loads applied to the SBLF. Higher-order beam theory that considers the variable shear and warping effect is considered in bending. The partially restrained warping at the junction between elements is also considered in torsion. The total strain energy is calculated, and the complete compliance matrix is derived by using Castigliano’s second theorem. Sensitivity analyses over the compliance elements are performed and verified via finite element analysis (FEA). The results show that the derived compliance elements are in good agreement with FEA, with errors of less than 7.6%. We suggest that theoretical compliance elements considering variable shear and warping in bending and partially restrained warping in torsion give highly accurate design equations representing the compliant mechanism of the SBLF. The present work could be used in a modal analysis of a single-bent leaf flexure.

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“…As a precise displacement generator, we proposed a displacement reduction mechanism using torsional leaf spring hinges (TLSHs) that consist of four leaf springs arranged radially [5]. It has been demonstrated that the reduction mechanism was able to provide one-nanometer displacement with 1/1000 reduction rate for the sinusoidal, triangular and rectangular motions by a piezoelectric actuator.…”

Section: Introductionmentioning

confidence: 99%

Generating Sub-nanometer Displacement Using Reduction Mechanism Consisting of Torsional Leaf Spring Hinges

Fukuda¹,

Hayashi²,

Marita³

2014

Measurement Science Review

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Recent demand on the measurement resolution of precise positioning comes up to tens of picometers. Some distinguished researches have been performed to measure the displacement in picometer order, however, few of them can verify the measurement performance as available tools in industry. This is not only because the picometer displacement is not yet required for industrial use, but also due to the lack of standard tools to verify such precise displacement.We proposed a displacement reduction mechanism for generating precise displacement using torsional leaf spring hinges (TLSHs) that consist of four leaf springs arranged radially. It has been demonstrated that a prototype of the reduction mechanism was able to provide one-nanometer displacement with 1/1000 reduction rate by a piezoelectric actuator. In order to clarify the potential of the reduction mechanism, a displacement reduction table that can be mounted on AFM stage was newly developed using TLSHs. This paper describes the design of the reduction mechanism and the sub-nanometer displacement performance of the table obtained from its dynamic and static characteristics measured by displacement sensors and from the AFM images.

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Generation of nanometer displacement using reduction mechanism consisting of torsional leaf spring hinges

Cited by 12 publications

References 8 publications

Angle of Twist of a Double-Bent Leaf Flexure under Torsion

Angle of Twist of a Double-Bent Leaf Flexure under Torsion

Compliance Matrix of a Single-Bent Leaf Flexure for a Modal Analysis

Generating Sub-nanometer Displacement Using Reduction Mechanism Consisting of Torsional Leaf Spring Hinges

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