1984
DOI: 10.1063/1.334237
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Generation of negative ions in tandem high-density hydrogen discharges

Abstract: An optimized tandem two-chamber negative-ion source system is discussed. In the first chamber high-energy (E>20 eV) electron collisions provide for H2 vibrational excitation, while in the second chamber negative ions are formed by dissociative attachment. The gas density, electron density, and system scale length are varied as independent parameters. The extracted negative ion current density passes through a maximum as electron and gas densities are varied. This maximum scales inversely with system sca… Show more

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Cited by 131 publications
(40 citation statements)
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“…In [6,41] the distributions of H (n) arizing from non-equilibrium ground VDFs have been investigated. In figures 15 the translational energy distribution functions (TEDFs) of atoms with principal quantum numbers n =3 and 4, for two different electron density values, corresponding to non-equilbrium VDFs [42] (see figure 14), are reported [6,41]. Results were obtained considering the cross section vibrational dependence well described by Franck-Condon density factors.…”
Section: Translational Energy Distribution Functions Of Atomic Hydrogmentioning
confidence: 99%
See 1 more Smart Citation
“…In [6,41] the distributions of H (n) arizing from non-equilibrium ground VDFs have been investigated. In figures 15 the translational energy distribution functions (TEDFs) of atoms with principal quantum numbers n =3 and 4, for two different electron density values, corresponding to non-equilbrium VDFs [42] (see figure 14), are reported [6,41]. Results were obtained considering the cross section vibrational dependence well described by Franck-Condon density factors.…”
Section: Translational Energy Distribution Functions Of Atomic Hydrogmentioning
confidence: 99%
“…Figure 14. Non-equilibrium vibrational distributionas a function of the vibrational quantum number for different electron densities [42].…”
Section: Translational Energy Distribution Functions Of Atomic Hydrogmentioning
confidence: 99%
“…In the first stage, high energy electrons e ℎ with e more than 20 eV excite H 2 molecules to generate vibrationally excited molecules H 2 * (ν) via the reaction H 2 + e ℎ → H 2 * + e . In the second stage, low energy electrons e with e~1 eV collide with H 2 * (ν) for the production of H − via dissociative attachment collisions reaction H 2 * + e → H − + H [15]. In the second stage, however, very low energy electrons with e < 0.5 eV have too small energy to cause the above reaction effectively [16].…”
Section: Introductionmentioning
confidence: 99%
“…[17][18][19][20] In such sources rovibrationally excited hydrogen plays a key role, since the negative hydrogen ions is formed in the dissociative attachment ͑DA͒ reaction. And this reaction becomes five orders of magnitude more efficient when the rovibrational energy of the hydrogen molecule is increased to around 2.5 eV.…”
Section: Introductionmentioning
confidence: 99%