Generation of uniform low-temperature plasma in a pulsed non-self-sustained glow discharge with a large-area hollow cathode

Akhmadeev, Yu. Kh.; Денисов, В. В.; Koval, N. N.; Kovalsky, S. S.; Lopatin, I. V.; Schanin, P. M.; Yakovlev, V. V.

doi:10.1134/s1063780x17010020

Cited by 36 publications

(9 citation statements)

References 10 publications

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“…The idea of the trigger method is as follows. When we apply the trigger pulse, the trigger discharge with a current of (10)(11)(12)(13)(14)(15)(16)(17)(18)(19)(20) A develops between the anode A 1 and the complexshaped hollow cathode, which incorporates the electrodes C 1 and C. Then we intensify the parasitic current, and in some conditions, the device can be triggered.…”

Section: Methods Of Triggering Pseudospark Switches With Auxiliary Gl...mentioning

confidence: 99%

“…The figure also demonstrates the principle of sustaining the discharge. It should be noted that there is great variety in the technical realizations of hollow-cathode discharge [18][19][20][21][22][23][24][25][26] that can superficially differ from the presented design. However, the general features of the discharge arrangement remain the same.…”

Section: Typical Systems For Obtaining Low-pressure Dischargesmentioning

confidence: 97%

“…As applied to the present paper, the case in point is the generation of a uniform plasma in a large volume of the cathode cavity at low pressure. Similar discharges were used, in particular, for the surface processing in [18][19][20][21]. The role of the hollow cathode C was played by the grounded vacuum chamber whose inner diameter (of about 60 cm) and height were comparable with each other [18].…”

Section: Typical Systems For Obtaining Low-pressure Dischargesmentioning

confidence: 99%

“…It seems to be convenient to link these applications to the different methods of obtaining the discharge. One of the discharge systems is intended for plasma generation in a large volume of the cathode cavity [18][19][20][21]. Such a discharge is often used for surface modification, when the samples are immersed in plasma [22][23][24][25][26][27].…”

Section: Introductionmentioning

confidence: 99%

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Low-pressure discharges with hollow cathode and hollow anode and their applications

Korolev¹,

Koval²

2018

J. Phys. D: Appl. Phys.

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The review relates to low-pressure discharges with a hollow cathode and a hollow anode. The term ‘low pressure’ implies that a neutral particle density is extremely small and the electron free path for ionization is in excess of the characteristic size for the discharge gap. On the other hand, the neutral particles still play an essential role in forming the gas-discharge plasma. Thus, the discharge regimes keep an intermediate position between the classical low-pressure discharge with avalanche ionization and pure vacuum discharge that burns in the cathode metal vapor. New approaches to the interpretation of the discharge formation mechanism at the stage of delay time to breakdown, and for the discharge sustaining features at the later temporal stages, are discussed. The developed approaches offer the possibility of interpreting the discharge behavior in the systems to obtain a uniform plasma in a large volume of the cathode or anode cavity, in the sources of electron and ion beams based on the plasma cathode and in the high-current pseudospark switches.

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Section: Methods Of Triggering Pseudospark Switches With Auxiliary Gl...mentioning

confidence: 99%

Section: Typical Systems For Obtaining Low-pressure Dischargesmentioning

confidence: 97%

Section: Typical Systems For Obtaining Low-pressure Dischargesmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Low-pressure discharges with hollow cathode and hollow anode and their applications

Korolev¹,

Koval²

2018

J. Phys. D: Appl. Phys.

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“…A more efficient approach to ion-plasma treatment inside a tube or cavity utilizes a low-pressure discharge (less than 1 Pa) formed within the tube [15,16]. The improved efficiency of this kind of system is related to the passage of ions through the near-cathode sheath with low collision probability because of the low pressure, and hence the availability of high energy ions.…”

Section: Introductionmentioning

confidence: 99%

Focused electron beam transport through a long narrow metal tube at elevated pressures in the forevacuum range

Bakeev

Karpov

Климов

et al. 2022

Plasma Sci. Technol.

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We present here our investigations of the features of focused electron beam transport in free space at elevated pressures of a few pascals. We have explored the effect of beam accelerating voltage, operating gas pressure, and magnetic focusing on the trajectory of beam electrons in the crossover region, in particular on the beam convergence and divergence angles. It is shown that for the forevacuum pressure range explored, 2–5 Pa, a distinctive feature of the propagation of a focused electron beam with current up to 20 mA at an accelerating voltage of 10–20 kV is the difference in the angles of convergence (before the focus) and divergence (after the focus). Whereas at a low pressure of 2 Pa the divergence angle is smaller than the convergence angle, as the pressure increases the divergence angle increases and for pressures greater than 5 Pa the divergence angle is greater than the convergence angle. The results obtained were used in experiments on electron beam transport through a long narrow metal tube with diameter 5.8–9.2 mm and length 10–30 cm. We show that for a 30-cm long tube of 7.5 mm diameter, the focused beam transmission can exceed 70%.

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Plasma Generation in a Pulsed Mode of a Non-Self-Sustained Arc Discharge with a Hybrid Hot-and-hollow Cathode

et al. 2019

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Generation of uniform low-temperature plasma in a pulsed non-self-sustained glow discharge with a large-area hollow cathode

Cited by 36 publications

References 10 publications

Low-pressure discharges with hollow cathode and hollow anode and their applications

Low-pressure discharges with hollow cathode and hollow anode and their applications

Focused electron beam transport through a long narrow metal tube at elevated pressures in the forevacuum range

Plasma Generation in a Pulsed Mode of a Non-Self-Sustained Arc Discharge with a Hybrid Hot-and-hollow Cathode

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