Geometric Nonlinear Model for Prediction of Frequency–Temperature Behavior of SAW Devices for Nanosensor Applications

Chen, Zhenglin; Zhang, Qiaozhen; Li, Congcong; Fu, Sulei; Qiu, Xiaojun; Wang, Xiaoyu; Wu, Haodong

doi:10.3390/s20154237

Cited by 8 publications

(4 citation statements)

References 31 publications

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“…Finally, it should be noted that, when having access to highly advanced and expensive manufacturing facilities, finite element method (FEM) simulations can be used to develop a physically based model for SAW design optimization [ 36 , 37 , 38 , 39 ], in order to meet the specific application requirements. On the other hand, when using commercial devices, the user has access to only the information available in the datasheets.…”

Section: Resultsmentioning

confidence: 99%

On the Performance Evaluation of Commercial SAW Resonators by Means of a Direct and Reliable Equivalent-Circuit Extraction

et al. 2021

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Nowadays, surface acoustic wave (SAW) resonators are attracting growing attention, owing to their widespread applications in various engineering fields, such as electronic, telecommunication, automotive, chemical, and biomedical engineering. A thorough assessment of SAW performance is a key task for bridging the gap between commercial SAW devices and practical applications. To contribute to the accomplishment of this crucial task, the present paper reports the findings of a new comparative study that is based on the performance evaluation of different commercial SAW resonators by using scattering (S-) parameter measurements coupled with a Lorentzian fitting and an accurate modelling technique for the straightforward extraction of a lumped-element equivalent-circuit representation. The developed investigation thus provides ease and reliability when choosing the appropriate commercial device, depending on the requirements and constraints of the given sensing application. This paper deals with the performance evaluation of commercial surface acoustic wave (SAW) resonators by means of scattering (S-) parameter measurements and an equivalent-circuit model extracted using a reliable modeling procedure. The studied devices are four TO-39 packaged two-port resonators with different nominal operating frequencies: 418.05, 423.22, 433.92, and 915 MHz. The S-parameter characterization was performed locally around the resonant frequencies of the tested SAW resonators by using an 8753ES Agilent vector network analyzer (VNA) and a home-made calibration kit. The reported measurement-based study has allowed for the development of a comprehensive and detailed comparative analysis of the performance of the investigated SAW devices. The characterization and modelling procedures are fully automated with a user-friendly graphical user interface (GUI) developed in the Python environment, thereby making the experimental analysis faster and more efficient.

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Section: Resultsmentioning

confidence: 99%

On the Performance Evaluation of Commercial SAW Resonators by Means of a Direct and Reliable Equivalent-Circuit Extraction

et al. 2021

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“…Chen et al [9] discussed the nonlinear model for the SAW sensor using COMSOL Multiphysics tool to simulate the resonant frequency shift of the sensor for quartz and Lithium Tantalate substrates. They observed that the simulated results corroborated the simulated results for variation in cut angles, metallization ratio and electrode thickness.…”

Section: Introductionmentioning

confidence: 99%

Design optimization of surface acoustic wave devices and investigation of fabricated devices under temperature, humidity and steam environments

Anbalagan,

Lakshminarayanan,

Girija

2024

Phys. Scr.

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Surface Acoustic Wave (SAW) technique is one of the most promising Micro Electro Mechanical Systems (MEMS) based detection methods for a variety of applications. SAW sensor is based on the modulation of Rayleigh waves that travel near the surface of a piezoelectric substrate. Advent of MEMS technology has led to the development of SAW sensors which are widely used in chemical sensing, medical, industrial, telecommunication and biological applications. The main focus of this paper is to devise and characterize a generic SAW structure and study the acoustic properties at various environmental conditions before depositing the sensing layer/analyte for any particular application. In this work, a SAW device was designed using COMSOL Multiphysics for a resonant frequency of 100 MHz with 40 µm wavelength on Lithium Niobate (LiNbO3) piezoelectric substrate. The optimized device structure was fabricated using thin film deposition and UV photolithography. The resonant frequency of the fabricated device (97.63 MHz) matched closely with the simulation results (100 MHz) and theoretical results (100 MHz). The device was subjected to various environmental conditions to study the influence on the resonant frequency. The SAW structure showed a resonant frequency shift of 90 KHz in steam environment, ~ 1MHz when heated to 150°C and ~120 KHz when exposed to 80% RH. The device exhibited a linear shift in resonant frequency under all tested environmental conditions with a consistent baseline and good repeatability.

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“…Surface acoustic wave (SAW) devices are used as resonators in electronic systems in a wide range of applications: mobile communications [ 1 , 2 ], sensors [ 3 , 4 ] and actuators [ 5 , 6 ], etc. Because of their excellent performance, including low insertion loss, high isolation, etc., filters and duplexers based on radio-frequency (RF) SAW resonators are mass-produced and widely used in current mobile phones [ 7 , 8 , 9 , 10 ].…”

Section: Introductionmentioning

confidence: 99%

Periodic Analysis of Surface Acoustic Wave Resonator with Dimensionally Reduced PDE Model Using COMSOL Code

Zhang

Chen

et al. 2021

Micromachines

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Radio-frequency (RF) surface acoustic wave (SAW) resonators used as filters and duplexers are mass-produced and widely used in current mobile phones. With the numerous emergences of the diverse device structure, a universal method used for the accurate and fast simulation of the SAW resonator calls for urgent demand. However, there are too many instances where the behavior of the entire acoustic resonator cannot be characterized rapidly and efficiently due to limitations in the current computer memory and speed. This is especially true for SAW resonators configured with long arrays of inter-digital transducers (IDTs), and we have to resort to a periodic analysis. In this paper, the previously reported generalized partial differential equations (PDE) based on the two-dimensional finite element method (2D-FEM) model is extended to analysis for the periodic structure of the SAW resonator. We present model order reduction (MOR) techniques based on FEM and periodic boundary conditions to achieve a dimensionally reduced PDE model without decreasing the accuracy of computations. Examples of different SAW devices, including the regular SAW, IHP-SAW and TC-SAW resonators, are provided which shows the results of the periodic analysis compared with the experimental results of the actual resonators. The investigation results demonstrate the properties of the proposed methodology and prove its effectiveness and accuracy.

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Geometric Nonlinear Model for Prediction of Frequency–Temperature Behavior of SAW Devices for Nanosensor Applications

Cited by 8 publications

References 31 publications

On the Performance Evaluation of Commercial SAW Resonators by Means of a Direct and Reliable Equivalent-Circuit Extraction

On the Performance Evaluation of Commercial SAW Resonators by Means of a Direct and Reliable Equivalent-Circuit Extraction

Design optimization of surface acoustic wave devices and investigation of fabricated devices under temperature, humidity and steam environments

Periodic Analysis of Surface Acoustic Wave Resonator with Dimensionally Reduced PDE Model Using COMSOL Code

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