Vak Forsch Prax
 2017
DOI: 10.1002/vipr.201700656
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Geregeltes Reaktivsputtern von Planar‐ und Rohrkathoden

Tobias Radny1,
Sebastian Grub2,
Rolf Schäfer3
et al.

Abstract: ViP 49Plasmavolumens angebracht ist, verändert diese dann allerdings auch die Plasmadynamik.

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