2016
DOI: 10.1063/1.4961132
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Germanium collimating micro-channel arrays for high resolution, high energy confocal X-ray fluorescence microscopy

Abstract: Abstract. Confocal x-ray fluorescence microscopy (CXRF) allows direct detection of x-ray fluorescence from a micron-scale 3D volume of an extended, unthinned sample. We have previously demonstrated the use of a novel collection optic, fabricated from silicon, that improves the spatial resolution of this approach by an order of magnitude over CXRF using polycapillaries. The optic, called a collimating channel array (CCA), consists of micron-scale, lithographically-fabricated arrays of collimating channels, all … Show more

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Cited by 8 publications
(4 citation statements)
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“…In contrast to polycapillaries, recently developed Collimating Channel Arrays (CCAs) provide both an overall improvement in resolution and, importantly, spatial resolution that is invariant with the X-ray fluorescence energy. 72 The new CXRF microscopy capability at sector 20-ID at the APS, enabled by CCAs, are capable of achieving depth resolution of 2 μm. In addition, CXRF microscopy significantly improves the signal-to-noise ratio by rejecting background scattering, thus increasing the limit of detection of fluorescent X-rays.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…In contrast to polycapillaries, recently developed Collimating Channel Arrays (CCAs) provide both an overall improvement in resolution and, importantly, spatial resolution that is invariant with the X-ray fluorescence energy. 72 The new CXRF microscopy capability at sector 20-ID at the APS, enabled by CCAs, are capable of achieving depth resolution of 2 μm. In addition, CXRF microscopy significantly improves the signal-to-noise ratio by rejecting background scattering, thus increasing the limit of detection of fluorescent X-rays.…”
Section: Methodsmentioning
confidence: 99%
“…CXRF experiments measurements making use of CCAs were made at the 20-ID beamline of the APS [72][73][74] on the same three samples that were previously measured with 2D XRF at the MRCAT/EnviroCAT beam line at the APS. An incident X-ray energy of 12 keV was used for the measurements.…”
Section: Xrf Confocal Imagingmentioning
confidence: 99%
“…The beamline monochromator and focusing optics were employed to deliver 3×10 11 photons/second in a 1×1 µm 2 beam, with incident beam energy of 10.0 keV and bandwidth of approximately 1 eV. The confocal geometry was achieved by placing a collimating channel array (CCA) (Agyeman-Budu et al, 2016) onto a single-element Vortex SDD detector perpendicular to the beam. The sample stage was oriented such that the horizontal translation axis of the stage is 35 degrees from that of the incident beam, and 55 degrees from the detector axis.…”
Section: Methodsmentioning
confidence: 99%
“…The XRF spectra were collected by a Si-drift Vortex detector perpendicular to the incident beam. A Ge optical unit (lithographically fabricated spoked channel array) was mounted in front of the detector to complete the confocal geometry [47][48][49].…”
Section: Cxmfi Analysis Of the Particles Loaded With Hg Was Conducted...mentioning
confidence: 99%