Germanium piezoresistive element on a flexible substrate

Edwards, W. D.; Beaulieu, R.

doi:10.1088/0022-3735/2/7/314

Cited by 14 publications

(6 citation statements)

References 3 publications

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“…The largest ambient temperature G found for single crystalline bulk silicon is G = 170, 3,5 and for germanium G = 100. 6 The state of the art material in the industry is poly-silicon, with G < 10, which can be improved to G 20 by using p-type poly-SiGe. 7 Recently, gauge factors of G 1000 were reported for silicon oxycarbonitride polymer-derived ceramic 5 and a G = 843 for a silicon-metal hybrid.…”

Section: Introductionmentioning

confidence: 99%

Giant piezoresistance in silicon-germanium alloys

Murphy-Armando

Fahy

2012

Phys. Rev. B

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Type of publicationArticle (peer-reviewed) We use first-principles electronic structure methods to show that the piezoresistive strain gauge factor of single-crystalline bulk n-type silicon-germanium alloys at carefully controlled composition can reach values of G = 500, three times larger than that of silicon, the most sensitive such material used in industry today. At cryogenic temperatures of 4 K we find gauge factors of G = 135 000, 13 times larger than that observed in Si whiskers. The improved piezoresistance is achieved by tuning the scattering of carriers between different ( and L) conduction band valleys by controlling the alloy composition and strain configuration.

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Section: Introductionmentioning

confidence: 99%

Giant piezoresistance in silicon-germanium alloys

Murphy-Armando

Fahy

2012

Phys. Rev. B

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“…The intrinsic resistance mostly initiates after the change in the band structure throughout deformation; such materials have been carried out, for example, carbon nanotubes (CNTs), [ 34 ] metal–organic framework (MOF), [ 35 ] graphene, [ 36 ] and semiconductors (Si, [ 37 ] Ge [ 38 ] ).…”

Section: Piezoresistive Pressure Sensors Based On E‐skinmentioning

confidence: 99%

Recent Progress in Flexible Pressure Sensors Based Electronic Skin

2021

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In recent years, implantable electronics, electronic skin (e-skin), and flexible wearable devices have been developed due to their extensive applications in health monitoring, intelligent robots, and human disease treatment. Tactile sensors are the keys necessary to build skin-inspired electronics. This article reviews the latest progress of e-skin-based flexible pressure sensors, such as piezoresistivity, capacitance, triboelectricity, and piezoelectricity from 2018 up to now. The working principles, structure design, active materials, and performance of numerous flexible pressure sensors are covered in detail. Finally, insights are provided and challenges and future perspectives of flexible pressure sensors in practical applications are discussed.

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“…The changes in the intrinsic resistance mainly originate from the change of the electronic band structure during deformation, which can be found in many materials such as semiconductors (Si, Ge), carbon nanotubes (CNTs), graphene, and metal‐organic framework (MOF) . Based on the hole transfer and conduction mass shift due to stress, the change in resistance of semiconductor has been widely used in mechanical sensors . The structure of the materials can significantly affect their sensing performance.…”

Section: Skin‐inspired Mechanical Sensorsmentioning

confidence: 99%

Physical sensors for skin‐inspired electronics

Zhang

Wang

et al. 2019

InfoMat

198

143

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Skin, the largest organ in the human body, is sensitive to external stimuli.In recent years, an increasing number of skin-inspired electronics, including wearable electronics, implantable electronics, and electronic skin, have been developed because of their broad applications in healthcare and robotics.Physical sensors are one of the key building blocks of skin-inspired electronics. Typical physical sensors include mechanical sensors, temperature sensors, humidity sensors, electrophysiological sensors, and so on. In this review, we systematically review the latest advances of skin-inspired mechanical sensors, temperature sensors, and humidity sensors. The working mechanisms, key materials, device structures, and performance of various physical sensors are summarized and discussed in detail. Their applications in health monitoring, human disease diagnosis and treatment, and intelligent robots are reviewed. In addition, several novel properties of skin-inspired physical sensors such as versatility, self-healability, and implantability are introduced. Finally, the existing challenges and future perspectives of physical sensors for practical applications are discussed and proposed. K E Y W O R D Selectronics skin, flexible electronics, humidity sensors, mechanical sensors, temperature sensors, wearable sensors

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Germanium piezoresistive element on a flexible substrate

Cited by 14 publications

References 3 publications

Giant piezoresistance in silicon-germanium alloys

Giant piezoresistance in silicon-germanium alloys

Recent Progress in Flexible Pressure Sensors Based Electronic Skin

Physical sensors for skin‐inspired electronics

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