2014
DOI: 10.1063/1.4903881
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GeSn p-i-n waveguide photodetectors on silicon substrates

Abstract: We report an investigation on GeSn p-i-n waveguide photodetectors grown on a Ge-buffered Si wafer. In comparison with a reference Ge detector, the GeSn detector shows an enhanced responsivity in the measured energy range, mainly attributed to the smaller bandgap caused by Sn-alloying. Analysis of the quantum efficiency indicates that increasing the Sn content in the active layers can significantly shorten the required device length to achieve the maximum efficiency. The present investigation demonstrates the p… Show more

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Cited by 97 publications
(50 citation statements)
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“…With a Sn content of x > 2%, the cutoff wavelength of the photodetection range can be extended beyond 1675 nm to fully cover the entirety of the fiberoptic telecommunication bands. Furthermore, compared to the typical responsivity of about 0.15 A/W for the GeSn p-i-n PDs [13], the Ge 1−x Sn x HPTs exhibit a much higher responsivity in the spectral range, owing to the current gain provided by the HPT structure. This indicates that the use of Ge 1−x Sn x HPTs not only achieves the extended photodetection range, but can also considerably enhanced responsivity.…”
Section: Theoretical Results and Discussionmentioning
confidence: 98%
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“…With a Sn content of x > 2%, the cutoff wavelength of the photodetection range can be extended beyond 1675 nm to fully cover the entirety of the fiberoptic telecommunication bands. Furthermore, compared to the typical responsivity of about 0.15 A/W for the GeSn p-i-n PDs [13], the Ge 1−x Sn x HPTs exhibit a much higher responsivity in the spectral range, owing to the current gain provided by the HPT structure. This indicates that the use of Ge 1−x Sn x HPTs not only achieves the extended photodetection range, but can also considerably enhanced responsivity.…”
Section: Theoretical Results and Discussionmentioning
confidence: 98%
“…With a smaller bandgap, the absorption edge of GeSn alloys can be considerably extended from 1.55 µm to the mid-infrared region, and the absorption coefficients can be significantly enhanced. Based on this development, different groups have demonstrated GeSn-based PDs with enhanced optical responsivity and an extended long-wavelength spectral response that reaches beyond 2.4 µm [6]- [13], thus covering the entirety of the fiber-optic telecommunication windows. However, the responsivities of the GeSn PDs are still limited, which prevents them from achieving the efficient photodetection required for EPIC applications.…”
Section: Introductionmentioning
confidence: 96%
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“…GeSn has also been widely reported for photodetection, and a relatively higher concentration of 9%-10% Sn has been used to demonstrate photodetector and photoconductor for 2.2-2.4 μm wavelengths in [19] and [20], respectively. A waveguide GeSn photodetector has been reported in [21]. Therefore it is feasible to realize a monolithically integrated GeSn sensor for wavelengths near 2.2 μm in order to detect greenhouse gases such a CO 2 .…”
Section: Introductionmentioning
confidence: 99%
“…The alloy may show direct gap for Sn concentration exceeding 8% or by applying tensile strain [2]. Many workers in recent years are trying to exploit the direct gap of the alloy to develop lasers [4] or photodetectors [5][6][7][8].…”
Section: Introductionmentioning
confidence: 99%