2020
DOI: 10.1364/oe.409276
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Giant enhancement of harmonic generation in all-dielectric resonant waveguide gratings of quasi-bound states in the continuum

Abstract: We report the giant enhanced optical harmonic generation in all-dielectric silicon nitride (SiN) based resonant waveguide gratings (RWGs) of quasi-bound states in the continuum (BICs) of ultra-high Q factor and localized field. The BICs are realized by tuning the excitation of the guided modes modulated by geometry parameters of four-part grating layer. At a feasible structure of quasi-BIC for nanofabrication, the SHG and THG are enhanced by 103 and 106, compared with those from the RWGs of traditional two-par… Show more

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Cited by 55 publications
(19 citation statements)
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“…The development of biosensors with fast response, high accuracy, and capability for real-time and on-site detection has become increasingly significant for human well-being, especially for the diagnosis and treatment monitoring of infectious disease threats. Biosensors require high sensitivity, high localized electromagnetic field can be tailored by tuning shape, size, periodicity, and composition of all-dielectric structures for broad applications such as sensing, [8] optical switching, [9] higher harmonic generation, [10,11] and color nanoprinting. [12] The advantages of all-dielectric structures over their plasmonic counterparts are attributed to their generally low intrinsic material damping and their compatibility with well-developed industrial semiconductor fabrication technologies such as complementary metal-oxide-semiconductor (CMOS).…”
Section: Introductionmentioning
confidence: 99%
“…The development of biosensors with fast response, high accuracy, and capability for real-time and on-site detection has become increasingly significant for human well-being, especially for the diagnosis and treatment monitoring of infectious disease threats. Biosensors require high sensitivity, high localized electromagnetic field can be tailored by tuning shape, size, periodicity, and composition of all-dielectric structures for broad applications such as sensing, [8] optical switching, [9] higher harmonic generation, [10,11] and color nanoprinting. [12] The advantages of all-dielectric structures over their plasmonic counterparts are attributed to their generally low intrinsic material damping and their compatibility with well-developed industrial semiconductor fabrication technologies such as complementary metal-oxide-semiconductor (CMOS).…”
Section: Introductionmentioning
confidence: 99%
“…The schematic unit cell of the SiN-GMR structure on a fused silicon substrate is shown in Figure 1a, similar to the structure reported in [26,27]. d a , d b and d c denote the width of filled and unfilled parts of grating layer, respectively.…”
Section: Numerical Model and Materials Parametersmentioning
confidence: 80%
“…The settings are similar to those we used in Refs. [9,27]. kx,i with different i under different angles of incidence is shown in Figure 1b.…”
Section: Numerical Model and Materials Parametersmentioning
confidence: 99%
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