Mn
x
Ga
thin films (1.64 ≤ x ≤ 2) were grown
at room temperature by molecular
beam epitaxy on the native SiO2 layer of Si(100) commercial
wafers. After growth, Mn
x
Ga films were
thermally annealed at different temperatures (200, 300, and 400 °C).
The X-ray diffraction results reveal D022-Mn2Ga as the main phase and an improvement of the crystalline quality
as a function of the annealing temperature. The samples were also
investigated using X-ray photoelectron spectroscopy, atomic force
microscopy, and vibrating sample magnetometry techniques. The magnetization
curves suggest that the magnetic behavior is strongly dependent on
the annealing time and temperature and that the saturation magnetization
decreases with an increase in the Mn concentration in the alloy. These
magnetic properties are related to the morphology and crystallinity
of the samples. The magnetic moment distributions of the films were
calculated using density functional theory, bringing a better understanding
of the origin of the observed magnetic anisotropy.