Giant Negative Piezoresistive Effect in Diamond-like Carbon and Diamond-like Carbon-Based Nickel Nanocomposite Films Deposited by Reactive Magnetron Sputtering of Ni Target

Abstract

Piezoresistive properties of hydrogenated diamond-like carbon (DLC) and DLC-based nickel nanocomposite (DLC:Ni) films were studied in the range of low concentration of nickel nanoparticles. The films were deposited by reactive high power pulsed magnetron sputtering (HIPIMS) of Ni target, and some samples were deposited by direct current (dc) reactive magnetron sputtering for comparison purposes. Raman scattering spectroscopy, energy-dispersive X-ray spectrometry (EDS), and X-ray photoelectron spectroscopy (XPS) were used to study the structure and chemical composition of the films. A four-point bending test was applied to study piezoresistive properties of the films. For some samples containing less than 4 at. % Ni and for the samples containing no Ni (as defined by both EDS and XPS), a giant negative piezoresistive effect was observed. The giant negative piezoresistive effect in DLC films deposited by either reactive HIPIMS or dc magnetron sputtering of Ni target was explained by possible clustering of the sp-bonded carbon and/or formation of areas with the decreased hydrogen content. It was suggested that the tensile stress-induced rearrangements of these conglomerations have resulted in the increased conductivity paths.

Piezoresistive behavior of amorphous carbon films for high performance MEMS force sensors

“…6,7 Recently, high piezoresistive gauge factors (GF) up to 1200 and giant negative GF up to -3200 have been obtained for amorphous carbon films with a different atomic carbon bond structure. [8][9][10][11] Furthermore, the role of H atoms, the sp 3 /sp 2 ratio, and the sp 2 cluster size in piezoresistive behavior of a-C/a-C:H films has also been studied. Tibrewala et al reported that the presence of H atoms in the films could greatly affect their GF.…”

Fabrication and characterization of Screen-printed Graphite and Nickel Based Thick Film Resistive Strain Sensor

“…Among them Nickel and graphite are also found to be strain sensitive material and they are used with other materials to enhance the piezo resistive nature of the overall compound [9], [14]- [16]. The effect of nickel particles in the composite enhances the piezo resistive effect of the compound [16]- [18] and the property is enhanced when there is change in temperature [19], [20]. In this paper, a composite of nickel nanoparticles and graphite is used as sensing material on a flexible substrate and the change in resistance for mechanical deformation is investigated and studied.…”

Enhanced Piezoresistive Behavior of SiC Nanowire by Coupling with Piezoelectric Effect

“…7 However, the Si-based sensors could not meet the requirements of some special circumstances involving the harsh working conditions, such as automotive engines, geothermal, deep well-drilling, and aerospace, due to its inherent defect of the narrow band gap (1.12 eV). 8 Furthermore, various other novel candidates had also been explored for improving the piezoresistive performance, including MoS 2 membranes, 9 graphene, 10 ceramics, 11 diamond-like carbon, 12 providing a great opportunity for major breakthroughs in the development of outstanding pressure sensors. Nevertheless, these candidates still suffer from poor chemical stability and low sensitivity owing to their own inherent defects, which results in limiting the device integration and application in harsh working conditions.…”