2020
DOI: 10.1021/acs.nanolett.0c01586
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Giant Tunable Mechanical Nonlinearity in Graphene–Silicon Nitride Hybrid Resonator

Abstract: High quality factor mechanical resonators have shown great promise in the development of classical and quantum technologies. Simultaneously, progress has been made in developing controlled mechanical nonlinearity. Here, we combine these two directions of progress in a single platform consisting of coupled silicon nitride (SiNx) and graphene mechanical resonators. We show that nonlinear response can be induced on a large area SiNx resonator mode and can be efficiently controlled by coupling it to a gate-tunable… Show more

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Cited by 38 publications
(27 citation statements)
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“…where N is the number of degrees-of-freedom, and the coefficients α (i) jk and γ (i) jkl are the quadratic and cubic coupling terms that depend on the geometry, elasticity, and curvature of the membrane, but can also originate from e.g. electrostatic or optical forces, resulting in mode coupling between 2D materials and SiN membranes [158] or cavity modes [29], as will be discussed later. Besides the nonlinear stiffness mode coupling terms in equation ( 23), there is a similar set of nonlinear damping mode coupling terms like…”
Section: Mode-coupling and Internal Resonancementioning
confidence: 99%
“…where N is the number of degrees-of-freedom, and the coefficients α (i) jk and γ (i) jkl are the quadratic and cubic coupling terms that depend on the geometry, elasticity, and curvature of the membrane, but can also originate from e.g. electrostatic or optical forces, resulting in mode coupling between 2D materials and SiN membranes [158] or cavity modes [29], as will be discussed later. Besides the nonlinear stiffness mode coupling terms in equation ( 23), there is a similar set of nonlinear damping mode coupling terms like…”
Section: Mode-coupling and Internal Resonancementioning
confidence: 99%
“…To examine whether alternative materials could allow for better performing resonators in the future, we consider silicon carbide, [ 48,120,121 ] graphene, [ 15,104,122 ] and diamond, [ 123–125 ] comparing their upper‐bounds of performance relative to silicon nitride. The upper‐bounds are calculated by assuming the material's intrinsic quality factor is the highest experimentally demonstrated to our knowledge at room temperature, [ 121,123,126 ] and their dissipation dilution limit is set by the material yield stress, [ 48,117,127 ] as described in ref.…”
Section: Strain Engineeringmentioning
confidence: 99%
“…To examine whether alternative materials could allow for better performing resonators in the future, we consider silicon carbide [48,120,121], graphene [15,104,122] and diamond [123][124][125], comparing their upper-bounds of performance relative to silicon nitride. The upper-bounds are calculated by assuming the material's intrinsic quality factor is the highest experimentally demonstrated to our knowledge at room temperature [104,121,123], and their dissipation dilution limit is set by the material yield stress [48,117,126], as described in Ref.…”
Section: Prospects For Strain Engineeringmentioning
confidence: 99%