2016
DOI: 10.1016/j.eurpolymj.2016.04.007
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GISAXS and GISANS as metrology technique for understanding the 3D morphology of block copolymer thin films

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Cited by 79 publications
(68 citation statements)
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“…Grazing-incidence small-angle X-ray scattering70 measurements were performed at the 11-ID CHX (Coherent Hard X-ray) beamline of the National Synchrotron Light Source II, at Brookhaven National Laboratory. Samples were measured under vacuum using an X-ray beam of 8.8984, keV ( λ =0.1393, nm).…”
Section: Methodsmentioning
confidence: 99%
“…Grazing-incidence small-angle X-ray scattering70 measurements were performed at the 11-ID CHX (Coherent Hard X-ray) beamline of the National Synchrotron Light Source II, at Brookhaven National Laboratory. Samples were measured under vacuum using an X-ray beam of 8.8984, keV ( λ =0.1393, nm).…”
Section: Methodsmentioning
confidence: 99%
“…The interaction of X-rays with scattering domains inside the film is simulated by form and structure factors that translate to domain shapes and their distances in real space. [17][18][19][20] Grazing-incidence wide angle X-ray scattering (GIWAXS) probes length scales down to the atomic range and thus yields crystallographic information about the crystalline part of the sample. Reflexes in the scattering pattern stem from crystal planes denoted in the reciprocal lattice by Miller indices (hkl) and give information about crystal phase and orientation with respect to the substrate surface normal.…”
Section: Research Newsmentioning
confidence: 99%
“…Some of the earlier OFFSpec and GISANS experiments are summarized in the short review by Dalgliesh [33] and Hamilton [34], respectively. A more recent review discusses the use of GISAXS and GISANS for the study of block copolymer thin films [35] and a paper by Lauter et al evaluates the power of so called complete reflectometry experiments evaluating NR, OFFSpec and GISANS [36,37] The low absorption of neutrons can be used to probe not only the reflected but also transmitted (Laue EPJ Web of Conferences 188, 04002 (2018) https://doi.org/10.1051/epjconf/201818804002 JDN 23 scattering) intensity measuring below the samples horizon. This offers the opportunity to access a wide range of Q values [38], e.g.…”
Section: Examplesmentioning
confidence: 99%