GLAD synthesised erbium doped In2O3 nano-columns for UV detection

Improve the Performance of SONOS Type UV TD Sensors Using IOHAOS with Enhanced UV Transparency ITO Gate

“…The post annealing process is used to optimize UV optical transmission and electrical resistivity characterization in ITO film. Via nanocolumns (NCols) crystalline transformation, UV transparency of ITO film can be enhanced by the temperature annealing process [21][22][23][24]. This study shows that an E-IOHAOS with NCols crystalline ITO can greatly improve the sensing response of a nonvolatile UV TD sensor.…”

“…The post annealing process is used to optimize UV optical transmission and electrical resistivity characterization in ITO film. Via nanocolumns (NCols) crystalline transformation of ITO film, UV transparency of ITO film can be enhanced [21][22][23][24]. This study shows that the UV optical transmittance and electrical conductivity of ITO film can be improved by the post annealing process.…”

“…The XRD analysis demonstrates the temperaturedependent crystallization of ITO films, as displayed in Figure 8. The peaks at around 2θ = 21.49 • , 30.57 • , and 51.00 • correlated with (2,1,1), (2,2,2), and (4,4,0) crystal structure plan of In 2 O 3 [21][22][23][24]. The intensity of the (2,2,2) XRD diffraction peak of ITO films increase with an increase of post anneal temperature.…”

“…The optical transmittance spectra of the annealed films are found to be changed with annealing temperature, which might be owing to a change in crystalline structure as shown in Figure 7a [21][22][23][24]. It is observed that the optical transmittance in the 405 nm, 375 nm, and 350 nm wavelength can be improved by the 500 • C and 600 • C annealing process.…”

“…It seems that the 500 • C 30 s annealed ITO film had longer and narrower NCols grain than 600 • C 30 s annealed ITO films, as shown in TEM results. The NCols crystal structure had longer and straighter grain for UV photon transport, whereas the equiaxed structure had more spherical-like grain boundaries for UV photon scattering [21][22][23][24]. Hence, the 500 • C 30 s annealed ITO film had best optical transmission than 250 • C 30 s and 600 • C 30 s annealed ITO films at 405 nm wavelength, respectively.…”