Glass Patterning: Technologies and Applications

Toàn, Nguyễn Văn; Inomata, Naoki; Toda, Masaya; Ono, Takahito

doi:10.5772/intechopen.74179

Cited by 5 publications

(5 citation statements)

References 32 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The wafer is subsequently immersed in an etching solution composed of HF and H 2 O 2 . MACE for high aspect ratio silicon structures was investigated in our recent work; however, this method cannot apply to this work due to the requirements of the photoresist patterning. A novel fabrication process was investigated in this work, as follows.…”

Section: Device Fabricationmentioning

confidence: 99%

See 1 more Smart Citation

Cantilever with High Aspect Ratio Nanopillars on Its Top Surface for Moisture Detection in Electronic Products

et al. 2017

Self Cite

View full text Add to dashboard Cite

This work reports the patterning silicon pillars by metal‐assisted chemical etching (MACE) process as a post process on a silicon cantilever for a moisture detection. Although the cantilever is very fragile, the patterning of the pillar structures on the cantilever has been successfully demonstrated. The cantilever coated with a material absorbing water (such as polyimide and mesoporous silica) can use as a humidity sensor. Its bending is due to the surface stress change from water molecule absorption. However, the bending of the cantilever is usually at a small value. Here, the silicon cantilever with high aspect ratio pillars on its surface is proposed, which is expected for a larger bending of the cantilever during the water molecule absorption. The moisture detection utilizes the principle that the pillars stack together based upon the condensation behavior of a water vapor on their surfaces.

show abstract

Section: Device Fabricationmentioning

confidence: 99%

“…Metal‐assisted chemical etching (MACE) has received attention recently . MACE process is a simple and low cost which performed in a wet etching solution, but it enables the formation of anisotropic silicon structures at room temperature and atmospheric pressure.…”

mentioning

confidence: 99%

Cantilever with High Aspect Ratio Nanopillars on Its Top Surface for Moisture Detection in Electronic Products

et al. 2017

Self Cite

View full text Add to dashboard Cite

show abstract

“…SOG can be divided into three major types: (1) silicatebased compounds, (2) organosilicon compounds, and (3) organic-dopant compounds [19]. The first two types of SOG described above are SiO 2 -based compounds.…”

Section: Sog Materialsmentioning

confidence: 99%

Enhanced light extraction from UV LEDs using spin-on glass microlenses

Liu

2016

J. Micromech. Microeng.

View full text Add to dashboard Cite

In this paper, we present a cost-effective method for fabricating spin-on glass (SOG) microlens arrays (MLAs) on ultra-violet light-emitting diodes. The SOG MLA is formed using thermal reflow molds and multiple replication processes, which can reduce the cost of the solution process. In this paper, we fabricate SOG MLA of different sizes, where the diameter of each microlens is approximately 50, 100, 150, and 200 μm. In each case, the light extraction efficiency is improved by 21.86%, 14.01%, 10.35%, and 7.31%, respectively. We also discuss the effects of different-shaped SOG microlenses, namely circular, square, and hexagonal. The light extraction efficiency is improved by 7.31%, 9.60%, and 13.80% for the circular, square, and hexagonal SOG MLAs, respectively. By applying an optimized lens pattern, an increase in light extraction efficiency of 21.86% is achieved.

show abstract

“…First, it is a cost‐effective process and easy to set up in the etching environment. Therefore, the wet etching process is advantageous for mass production 64–66 . Furthermore, it offers a high etch rate, superior selectivity, and cost‐effectiveness compared to other methods.…”

Section: Introductionmentioning

confidence: 99%

“…Therefore, the wet etching process is advantageous for mass production. [64][65][66] Furthermore, it offers a high etch rate, superior selectivity, and cost-effectiveness compared to other methods.…”

Section: Introductionmentioning

confidence: 99%

Eco‐friendly glass wet etching for MEMS application: A review

Choi,

Kim,

Lee

et al. 2024

J Am Ceram Soc.

View full text Add to dashboard Cite

Glass is one of the most essential materials in various industrial fields. A representative application is as interposers in the semiconductor and display industries and microfluidic devices in the bio‐industry. Due to technological advancements, electric devices and various products are becoming lighter and smaller. Consequently, precision processing of the substrate is becoming increasingly important. One significant leading technology among these is through glass via (TGV) technology, which is attracting attention as a future alternative to through silicon via. In particular, TGV should be capable of microfabrication with a large aspect ratio and a consistent small hole size. TGV is typically fabricated using a wet etching process, so wet etching technology is a prominent focus in microfabrication. However, glass has isotropic properties, making achieving a high aspect ratio difficult. Traditionally, research on the wet etching method using hydrofluoric acid (HF) has been conducted. Nevertheless, HF etching has several disadvantages, including air pollution and human harm. Additional studies have been performed to address these issues. This review paper will cover the conventional HF‐based wet etching method and alternative HF etching processes (eco‐friendly materials). This technology would significantly help overcome the traditional problems associated with HF etching and fabricating precision‐processed glass in the semiconductor, display, and bio‐device industries.

show abstract

Glass Patterning: Technologies and Applications

Cited by 5 publications

References 32 publications

Cantilever with High Aspect Ratio Nanopillars on Its Top Surface for Moisture Detection in Electronic Products

Cantilever with High Aspect Ratio Nanopillars on Its Top Surface for Moisture Detection in Electronic Products

Enhanced light extraction from UV LEDs using spin-on glass microlenses

Eco‐friendly glass wet etching for MEMS application: A review

Contact Info

Product

Resources

About