1994
DOI: 10.1149/1.2054960
|View full text |Cite
|
Sign up to set email alerts
|

Global Model of Plasma Chemistry in a High Density Oxygen Discharge

Abstract: The gas-phase kinetics and plasma chemistry of high density oxygen discharges are studied. A self-consistent spatially averaged model is developed to determine positive ion, negative ion, and electron densities, ground state and metastable free radical densities, and electron temperature as functions of gas pressure, microwave input power, and cylindrical source diameter and length. For an electron cyclotron resonance discharge, the reduction in radial transport due to the confining magnetic field is also mode… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

5
172
2
1

Year Published

1999
1999
2024
2024

Publication Types

Select...
7
1

Relationship

0
8

Authors

Journals

citations
Cited by 231 publications
(180 citation statements)
references
References 11 publications
5
172
2
1
Order By: Relevance
“…In attempts trying to theoretically describe low-temperature plasmas typically global models are used to calculate the electron temperature, the electron density and the species densities by solving the power and the particle balance under the quasi-neutrality condition self-consistently 17,18,[24][25][26] . In contrast, the model applied here considers only the particle balance under quasi-neutrality condition.…”
Section: A General Remarksmentioning
confidence: 99%
“…In attempts trying to theoretically describe low-temperature plasmas typically global models are used to calculate the electron temperature, the electron density and the species densities by solving the power and the particle balance under the quasi-neutrality condition self-consistently 17,18,[24][25][26] . In contrast, the model applied here considers only the particle balance under quasi-neutrality condition.…”
Section: A General Remarksmentioning
confidence: 99%
“…As shown by Lee et al [26] the dominant species at 10 Pa is indeed atomic oxygen. The degree of ionisation and the concentration of ionised species are relatively low at this pressure.…”
Section: Optical Emission Spectroscopymentioning
confidence: 68%
“…As Lee et al [26] show it can even reach concentrations up to 50% depending on the plasma parameters. On the basis of our analytical methods we cannot determine the absolute concentration of oxygen atoms but assume that its concentration depends linearly on the plasma power as it does the degree of ionisation.…”
Section: Atomic Oxygenmentioning
confidence: 93%
See 1 more Smart Citation
“…The oxygen radical density profile was calculated by a one-dimensional numerical model using the measured electron temperatures and densities in the O 2 -Ar plasma (10) (16,17,18). The negative oxygen ion was neglected because of the high gas temperatures, since these tend to generate a very low negative ion density.…”
Section: Constituent Species Axial Direction Distribution In An O 2 -mentioning
confidence: 99%