2024
DOI: 10.1002/admt.202401184
|View full text |Cite
|
Sign up to set email alerts
|

Glycerol Vapor Assisted Cu Direct Bonding: Implications for 3D Semiconductor Packaging

Jeehoo Na,
Eunhye Lee,
Kyung‐Ho Park
et al.

Abstract: As the scaling down of semiconductor devices reaches its physical limits, 3D stacking packaging technology is emerging as a new miniaturization solution. Among the various 3D packaging technologies, Cu direct bonding is widely adopted due to copper's excellent electrical conductivity and the absence of intermetallic compounds for solder bumps. Since copper readily undergoes oxidation, technologies that prevent Cu surface oxidation during Cu direct bonding are essential. However, current research suggests that … Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

0
0
0

Publication Types

Select...

Relationship

0
0

Authors

Journals

citations
Cited by 0 publications
references
References 24 publications
0
0
0
Order By: Relevance

No citations

Set email alert for when this publication receives citations?