2008
DOI: 10.1088/0960-1317/18/6/064002
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Gold/tin soldering of flexible silicon chips onto polymer tapes

Abstract: A novel method for biocompatible gold/tin soldering of ultrathin silicon chips onto flexible polyimide tapes is presented. Apart from substantial weight and volume reductions, flexible silicon chips enable the fabrication of flexible microsystems with the advantage of good adaptability to the geometry of the place of use. Silicon chips with thicknesses between 16 and 25 µm were fabricated and bonded onto 5 µm thick polyimide tapes using eutectic Au80Sn20 solder. The contact resistance per bond was of the order… Show more

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Cited by 8 publications
(8 citation statements)
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“…In the second example, we demonstrate that dissimilar nanowires can be welded together, using a third material as solder. SnAu alloy solder, widely used in macroscopic welding technique due to its excellent conductivity, low melting point, and large corrosion resistance, 25 is specifically chosen to result in an ultralow electrical resistance join between nanowires. The ability to integrate functional nanowires into circuits via high-performance welded joins represents a significant advance for nanoscale sensor development.…”
mentioning
confidence: 99%
“…In the second example, we demonstrate that dissimilar nanowires can be welded together, using a third material as solder. SnAu alloy solder, widely used in macroscopic welding technique due to its excellent conductivity, low melting point, and large corrosion resistance, 25 is specifically chosen to result in an ultralow electrical resistance join between nanowires. The ability to integrate functional nanowires into circuits via high-performance welded joins represents a significant advance for nanoscale sensor development.…”
mentioning
confidence: 99%
“…Furthermore, temperatures required for melting solder are typically higher than the degradation or melting temperature of the polymers previously discussed, with the exception of polyimide and OSTE+ [ 61 ]. Polyimide has been shown to be amenable to solder of various alloys [ 81 , 156 , 157 ] (see Figure 7 for an example of device packaging through soldering).…”
Section: Packagingmentioning
confidence: 99%
“…Only methods for ultrathin wafer processing that require limited transfers between the wafer carriers can provide reliable operations with high throughput at low production cost. Consequently, a process called ''Dicing-By-Thinning'' or ''Dicing-Before-Grinding'' was suggested [4,[16][17][18][19] in which halfcut dicing is carried out on the wafer's front side before thinning. After bonding to a handle wafer or backgrinding tape, the half-diced wafer is thinned by backgrinding until trenches are opened and dice separated.…”
Section: Wafer Dicingmentioning
confidence: 99%