2012 IEEE Nuclear Science Symposium and Medical Imaging Conference Record (NSS/MIC) 2012
DOI: 10.1109/nssmic.2012.6551945
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Grain growth and characteristics of chlorine doped thick polycrystalline CdZnTe films

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“…3,4 The doping CdZnTe films can be prepared by various methods, including thermal evaporation, radio frequency (rf) magnetron sputtering, electrodeposition and closed space sublimation. [5][6][7][8] However, these methods suffered the problem of defects and non-uniform composition during the deposition process, thus causing descend of resistivity and homogeneity in CdZnTe film, which limits its application. From this reason, rf magnetron sputtering with aluminium induced crystallisation (AIC) method was proposal to fabricate high resistivity Al doped CdZnTe films.…”
Section: Introductionmentioning
confidence: 99%
“…3,4 The doping CdZnTe films can be prepared by various methods, including thermal evaporation, radio frequency (rf) magnetron sputtering, electrodeposition and closed space sublimation. [5][6][7][8] However, these methods suffered the problem of defects and non-uniform composition during the deposition process, thus causing descend of resistivity and homogeneity in CdZnTe film, which limits its application. From this reason, rf magnetron sputtering with aluminium induced crystallisation (AIC) method was proposal to fabricate high resistivity Al doped CdZnTe films.…”
Section: Introductionmentioning
confidence: 99%