“…reactive magnetron sputtering [5,6], pulsed laser deposition [7], chemical vapor deposition [8], atomic layer deposition [9], ion-implantation technique [10], and sol-gel process [11][12][13][14]. The sol-gel process has distinct advantages over the other techniques due to excellent compositional control, homogeneity on the molecular level due to the mixing of liquid precursors, and lower crystallization temperature.…”