Grating couplers fabricated by e-beam lithography for long-range surface plasmon waveguides embedded in a fluoropolymer

Hirboodvash, Zohreh; Khodami, Maryam; Fong, Norman R.; Lisicka-Skrzek, Ewa; Olivieri, Anthony; Northfield, Howard; Tait, R. Niall; Berini, Pierre

doi:10.1364/ao.58.002994

Cited by 11 publications

(7 citation statements)

References 33 publications

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“…They can also be utilized for biosensing with biomaterial binds to the surface and changes the effective refractive index of the plasmonic waveguides. Schemes for conversion of beam from optical fiber or free-space into SPPs include prisms, edge couplers, antenna structures and GCs [ 138 , 139 , 140 , 141 ]. GC is advantageous in terms of easy fabrication and simple structure.…”

Section: Emerging Trends In Grating Coupler Researchmentioning

confidence: 99%

Grating Couplers on Silicon Photonics: Design Principles, Emerging Trends and Practical Issues

et al. 2020

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Silicon photonics is an enabling technology that provides integrated photonic devices and systems with low-cost mass manufacturing capability. It has attracted increasing attention in both academia and industry in recent years, not only for its applications in communications, but also in sensing. One important issue of silicon photonics that comes with its high integration density is an interface between its high-performance integrated waveguide devices and optical fibers or free-space optics. Surface grating coupler is a preferred candidate that provides flexibility for circuit design and reduces effort for both fabrication and alignment. In the past decades, considerable research efforts have been made on in-plane grating couplers to address their insufficiency in coupling efficiency, wavelength sensitivity and polarization sensitivity compared with out-of-plane edge-coupling. Apart from improved performances, new functionalities are also on the horizon for grating couplers. In this paper, we review the current research progresses made on grating couplers, starting from their fundamental theories and concepts. Then, we conclude various methods to improve their performance, including coupling efficiency, polarization and wavelength sensitivity. Finally, we discuss some emerging research topics on grating couplers, as well as practical issues such as testing, packaging and promising applications.

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Section: Emerging Trends In Grating Coupler Researchmentioning

confidence: 99%

Grating Couplers on Silicon Photonics: Design Principles, Emerging Trends and Practical Issues

et al. 2020

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“…Small, closely spaced metallic features of dimensions and separation in the micrometer range are of interest in electrochemical device applications or for integration with optical biosensors, e.g., based on surface plasmon-polaritons (SPPs) [1][2][3]. Optical biosensors exploiting long-range surface plasmon-polariton (LRSPP) waveguides have solicited significant interest because they enable compactness in integrated architectures, and offer very high sensitivity in an arrayed format [4][5][6][7]. LRSPPs are supported by a thin metal slab or stripe bounded by dielectrics of similar refractive index [8].…”

Section: Introductionmentioning

confidence: 99%

“…LRSPPs are supported by a thin metal slab or stripe bounded by dielectrics of similar refractive index [8]. For biosensing, the metal stripe is typically formed of Au and is supported by a cladding of low refractive index, e.g., a fluoropolymer such as Cytop, which has an index close to water and is thus well-matched to the index of aqueous biosensing media [5,6]. Alternatively, Au-sensing waveguides can be fabricated on a multilayer dielectric cladding, behaving optically as a 1-D photonic crystal (1DPC), and supporting Bloch LRSPPs within the bandgap of the 1DPC [4,5,7].…”

Section: Introductionmentioning

confidence: 99%

“…Motivated by the high sensitivity of Au stripe LRSPP waveguide biosensors [4][5][6][7], along with their suitability for high levels of integration, we investigate microelectrode systems suitable for integration with such optical biosensors, to ultimately enable multi-modal sensing strategies, of strong interest in, e.g., disease detection problems. The use of highvolume wafer-scale manufacturing tools and techniques in the fabrication of the sensors ensures a low chip cost.…”

Section: Introductionmentioning

confidence: 99%

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Electrochemical Performance of Lithographically-Defined Micro-Electrodes for Integration and Device Applications

et al. 2021

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Small; lithographically-defined and closely-spaced metallic features of dimensions and separation in the micrometer range are of strong interest as working and counter electrodes in compact electrochemical sensing devices. Such micro-electrode systems can be integrated with microfluidics and optical biosensors, such as surface plasmon waveguide biosensors, to enable multi-modal sensing strategies. We investigate lithographically-defined gold and platinum micro-electrodes experimentally, via cyclic voltammetry (CV) measurements obtained at various scan rates and concentrations of potassium ferricyanide as the redox species, in potassium nitrate as the supporting electrolyte. The magnitude of the double-layer capacitance is estimated using the voltammograms. Concentration curves for potassium ferricyanide are extracted from our CV measurements as a function of scan rate, and could be used as calibration curves from which an unknown concentration of potassium ferricyanide in the range of 0.5–5 mM can be determined. A blind test was done to confirm the validity of the calibration curve. The diffusion coefficient of potassium ferricyanide is also extracted from our CV measurements by fitting to the Randles–Sevcik equation (D = 4.18 × 10−10 m2/s). Our CV measurements were compared with measurements obtained using macroscopic commercial electrodes, yielding good agreement and verifying that the shape of our CV curves do not depend on micro-electrode geometry (only on area). We also compare our CV measurements with theoretical curves computed using the Butler–Volmer equation, achieving essentially perfect agreement while extracting the rate constant at zero potential for our redox species (ko = 10−6 m/s). Finally, we demonstrate the importance of burn-in to stabilize electrodes from the effects of electromigration and grain reorganization before use in CV measurements, by comparing with results obtained with as-deposited electrodes. Burn-in (or equivalently, annealing) of lithographic microelectrodes before use is of general importance to electrochemical sensing devices

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“…This requires intricate knowledge of the optical properties of SPPs and control over their electromagnetic interactions. Research into the development of interfacial plasmonic optics aimed at controlling the (out)coupling [4][5][6][7][8][9], direction [10][11][12][13][14], and focusing [15][16][17][18][19][20] of SPP fields has been motivated by these objectives. One common feature of such systems is that they utilize micro-or nanopatterned plasmonic components to achieve coupling.…”

mentioning

confidence: 99%

Surface plasmon polariton pulse shaping via two-dimensional Bragg grating pairs

2020

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We demonstrate control over the spatial and temporal properties of surface plasmon polaritons (SPPs) launched from nanohole arrays in silver. The arrays provide wave vector matching to allow the conversion of free-space photons into counter-propagating SPPs. SPPs launched from multiple arrays interfere at well-defined spatial positions, and the interference fringes form an all-SPP periodic nano-optical grating which evolves in space and time as the SPPs propagate. The spatio-temporal characteristics of the optical grating can be tuned through various nanohole array parameters such as tilt angle, separation, and array width. In addition, we examine multiperiodic arrays (MPAs) consisting of arrays with different pitches placed adjacent to one another. This platform allows the temporal interference of SPPs with different central wavelengths to be tailored through the MPA geometric and structural parameters. The temporal interference serves as an encoded signal, whereby the frequency components can be controlled by the array properties.

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Grating couplers fabricated by e-beam lithography for long-range surface plasmon waveguides embedded in a fluoropolymer

Cited by 11 publications

References 33 publications

Grating Couplers on Silicon Photonics: Design Principles, Emerging Trends and Practical Issues

Grating Couplers on Silicon Photonics: Design Principles, Emerging Trends and Practical Issues

Electrochemical Performance of Lithographically-Defined Micro-Electrodes for Integration and Device Applications

Surface plasmon polariton pulse shaping via two-dimensional Bragg grating pairs

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