Grating light valve based on high reflectance micro-beams: Design by simulation

Abstract

In this paper are presented the results of grating light valve (GLV) structure simulation using Coventorware software in order to maximize the intensity of diffracted light in the ±1 diffraction orders. Was simulated a GLV element which consists from 6 high reflective micro-beams suspended above a silicon substrate and which are ellectrostatically actuated. By simulation are optimized the length, width and thicknesses of the micro-beam and the space between micro-beams to obtaining a deflection of λ/4 at moderate value of applied voltage.

Vapor-Phase Deposited Chlorosilane-Based Self-Assembled Monolayers on Various Substrates for Thermal Stability Analysis

“…Microelectromechanical systems (MEMS) are devices with mechanical components whose characteristic size ranges from a few to a few hundred micrometers in size and that are directly integrated with electrical components. − One of the key issues affecting the performance of such applications is the mechanical or electronic interactions between different parts on the MEMS device, either with or without contact, which respond to certain changes. − For example, stiction is one of the greatest bottlenecks in the commercialization of highly complex MEMS systems. As a result, considerable research effort has been dedicated to surface modification techniques, where molecular films formed from various precursors are used to alter the surface properties and to meet application requirements, such as thermal stability. − Thermal stability is essential for the practical application of MEMS devices, which are typically subjected to packaging processes and applications requiring long-term durability in specialized environments.…”

Tip tracking control of a micro-cantilever Timoshenko beam via piezoelectric actuator

“…A review on researches conducted on AFM can be found in the work of Jalili and Laxminarayana (2004). Microswitch is another application of micro-beams that is used for high frequency switching (Suzuki and Neav, 2003;Coutu et al, 2004;Vummidi et al, 2009;Mohammadi-Alasti et al, 2010).Other famous applications are micro mirrors (Tuantranont et al, 2000;Youngjoo et al, 2000;Kim et al, 2010) and grating light valves (Perry, 2004;Florin et al, 2010;Rudra et al, 2010).…”