2020
DOI: 10.1364/ol.394940
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Greater than one billion Q factor for on-chip microresonators

Abstract: High optical quality (Q) factors are critically important in optical microcavities, where performance in applications spanning nonlinear optics to cavity quantum electrodynamics is determined. Here, a record Q factor of over 1.1 billion is demonstrated for on-chip optical resonators. Using silica whispering-gallery resonators on silicon, Q-factor data is measured over wavelengths spanning the C/L bands (100 nm) and for a range of resonator sizes and mode families. A record low sub-milliwatt parametric oscillat… Show more

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Cited by 87 publications
(50 citation statements)
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“…Soliton generation in silica microresonators. A silica disk microresonator with intrinsic Q factor exceeding 300 million and free-spectral-range (FSR) around 15 GHz is used in the study 27,28 . The microresonator is packaged with active temperature stabilization 29 and operated under an acoustic shield to block environmental perturbations ( Fig.…”
Section: Resultsmentioning
confidence: 99%
“…Soliton generation in silica microresonators. A silica disk microresonator with intrinsic Q factor exceeding 300 million and free-spectral-range (FSR) around 15 GHz is used in the study 27,28 . The microresonator is packaged with active temperature stabilization 29 and operated under an acoustic shield to block environmental perturbations ( Fig.…”
Section: Resultsmentioning
confidence: 99%
“…Mitigation strategies include additional targeted annealing steps and dangling bond passivation to prevent the formation of unwanted molecules. It may also be possible to further increase the Q by utilizing a TM mode, which is less susceptible to waveguide roughness and has lower propagation losses 27,28 .…”
Section: Discussionmentioning
confidence: 99%
“…To-date, integrated resonators have been limited to intrinsic Q values below 260 Million for ring-based 26 and 150 Million for spiral-based 25 waveguide designs. Significant progress has been made with hybrid designs that employ an on-chip etched silica disk resonator, demonstrating 206 Million 27 and recently a record 1.1 Billion 28 . However, these designs are not fully compatible with wafer-scale fabrication, are susceptible to environmental conditions, and need hermetic sealing as well as careful mode engineering.…”
mentioning
confidence: 99%
“…Also, a 6-fold increase in the sensitivity of the Brillouin ring laser gyroscope was reported when an ultrahigh Q silica wedge resonator (Q > 100 million) was being used [16]. Such favourable performance scaling has stimulated phenomenal progress in obtaining narrow resonances through platforms like gas-phase atomic systems [18,19], photonic crystal cavities [11,[20][21][22], whispering gallery mode (WGM) [23,24], and microring resonators [25][26][27], slow-light fiber Bragg gratings (FBGs) [2], and phase-shifted FBGs [28]. However, despite significant progress, there remain many challenges with these platforms.…”
mentioning
confidence: 99%
“…Narrow resonances can be realized in gas-phase atomic systems using electromagnetically induced transparency (EIT) [18,19], but they typically require low temperatures to obtain sub-MHz resonances. Photonic crystal cavities [11,[20][21][22], WGM [23,24], and microring resonators [25][26][27] usually require complex and costly fabrication steps like chemical-mechanical polishing and high temperature anneals to obtain sub-MHz resonances [29]. Impedance-matched resonator based on -phase-shifted FBGs have exhibited narrow resonances [28], but their resonance linewidth is limited to a few MHz due to their intrinsic losses.…”
mentioning
confidence: 99%