2024
DOI: 10.1364/ome.528391
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Green etching of indium tin oxide metasurfaces

Samuel F. J. Blair,
Joshua S. Male,
Christopher P. Reardon
et al.

Abstract: Metasurfaces have become integral elements of the modern nanophotonics toolkit, finding applications in many areas of photonics. With the recent rise in the use of transparent conducting oxides (TCOs), there is a desire to fabricate metasurface structures directly into materials such as indium tin oxide (ITO) to utilize their tunability and non-linear effects. Current ITO dry etching techniques use harsh chemically active gases such as Cl2 or environmentally damaging gases such as CH4. As a result, etching pro… Show more

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