Grinding and lapping induced surface integrity of silicon wafers and its effect on chemical mechanical polishing

Gao, Shang; Li, Honggang; Huang, Han; Kang, Renke

doi:10.1016/j.apsusc.2022.153982

Cited by 109 publications

(18 citation statements)

References 39 publications

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“…Molecular electrostatic potential (MESP) analysis was employed to describe regions of charge density accumulation. 31 Molecular orbital and QTAIM BCP isosurfaces were visualized using VMD software, 32 while Origin software facilitated the visualization of the density of states (DOS). 33 Chemcraft 1.8 was utilized to present the structural geometry, including bond lengths, bond angles, and the distance of hydrogen molecule adsorption.…”

Section: Computational Detailsmentioning

confidence: 99%

“…Furthermore, the strength of interactions was validated by examining topological parameters such as electron density (p), Laplacian density (V 2p), and total electron energy density (H(r)) at bond critical points (BCP) via quantum theory of atoms in molecule (QTAIM) analysis. Molecular electrostatic potential (MESP) analysis was employed to describe regions of charge density accumulation . Molecular orbital and QTAIM BCP isosurfaces were visualized using VMD software, while Origin software facilitated the visualization of the density of states (DOS) .…”

Section: Computational Detailsmentioning

confidence: 99%

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Assessing the Performance of Transition Metals (M = Hf, Ti, and Zr) Decorated Silicon Carbide Nanotubes (M@SiCNTs) for Hydrogen Storage Applications: Insights from Theoretical Calculations

Chukwu,

Unimuke,

Trabelsi

et al. 2023

ACS Appl. Energy Mater.

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This study conducted a thorough evaluation of the hydrogen storage capabilities exhibited by silicon carbide nanotubes (SiCNTs) functionalized with transition metals (Ti, Hf, and Zr). The investigation utilized dispersion-corrected D3(BJ) density functional theory (DFT) computational methods at the B3LYP/ def2svp level of theory. The primary objective was to evaluate the potential of metal-decorated nanotubes for efficient molecular hydrogen storage while also examining the impact of transition metals as adsorption sites. The electronic characteristics of the pristine SiCNT, featuring an energy gap of 3.447 eV, underwent significant improvement upon decoration with specific metals (Ti@SiCNT, Zr@SiCNT, and Hf@SiCNT). The resulting energy values were 2.419, 1.559, and 1.875 eV, respectively. We further investigated the adsorption energy and hydrogen storage capacity of Ti@SiCNT, Zr@SiCNT, and Hf@SiCNT in the adsorption process of the nH 2 (n = 1−4) molecule. The adsorption energies varied from −0.245 to 0.375 eV, falling well within the hydrogen storage material range suggested by the US Department of Energy. This research contributes valuable insights into the potential of transition metal-functionalized SiCNTs as promising candidates for hydrogen storage applications. As hydrogen molecules were stepwise adsorbed, the adsorption energy followed the order of Ti > Zr > Hf, highlighting Ti and Zr's superior performance in multiple hydrogen adsorption scenarios. To assess hydrogen storage capacity and release, gravimetric analysis, desorption temperatures, and energies were considered. The average desorption energies were calculated as −3.544, −3.324, and −3.537 eV for 4H 2 _Ti@SiCNT, 4H 2 _Zr@SiCNT, and 4H 2 _Hf@SiCNT, respectively. As additional hydrogen molecules were removed, the desorption energy became more negative, indicating a greater favorability for hydrogen release across all systems. Based on the calculated adsorption energy, electronic properties, desorption energy, and weight percent of the nanomaterials, which align with DoE standards, it can be concluded that the studied materials exhibit highly promising attributes for hydrogen storage applications.

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Section: Computational Detailsmentioning

confidence: 99%

Section: Computational Detailsmentioning

confidence: 99%

Assessing the Performance of Transition Metals (M = Hf, Ti, and Zr) Decorated Silicon Carbide Nanotubes (M@SiCNTs) for Hydrogen Storage Applications: Insights from Theoretical Calculations

Chukwu,

Unimuke,

Trabelsi

et al. 2023

ACS Appl. Energy Mater.

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“…Researchers commonly employ different wear testing methods, such as pin-on-disc, ball-on-disc, or abrasive wear tests, to simulate real-world conditions and assess the wear behaviour of Al-Borosilicate MMC. These tests help in determining the wear rate, coefficient of friction, and the mechanisms involved in the wear process [26][27][28][29][30].…”

Section: Introductionmentioning

confidence: 99%

Tribological impact on borosilicate glass powder reinforced Al-MMC by variation of sliding velocity and the study of its machinability

Bhowmik,

Bhattacharjee,

et al. 2024

Phys. Scr.

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Now-a-days, metal matrix composites based on pure aluminium are widely used as a replacement for a wide range of applications thanks to their high strength-to-weight ratio, ductility, and thermal conductivity. Micron-sized (10-3 mm) borosilicate (mixer of Silica (SiO2) and Boron Oxide (B2O3)) glass particles were used to create a dispersion in an aluminium matrix composite (Al7075- borosilicate glass MMC) utilizing a stir casting technique while in a liquid condition. The present study examines the effect of borosilicate glass particle content (0, 3, 6, and 9 wt. %) and changes in sliding velocity (0.5, 1, 1.5, and 2 m/s) on the wear behaviour of a composite rubbing against an EN31 steel disc at a constant load of 20N and a sliding distance of 1000 m. Analysis of wear showed that the presence of borosilicate glass increased the wear rate and countered the trend shown in the coefficient of friction. In a similar vein, the sliding velocity of the counter plate rotated faster resulted in a higher coefficient of friction and a higher wear rate. A reliable mathematical model is developed to find the best combination of machining parameters for Al7075-borosilicate glass metal matrix composite (MMC). This model will consider important performance measures like surface smoothness and material removal rate. The authors will also use a sophisticated statistical method called the Taguchi L9 orthogonal array design of experiments (DOE) to understand how different machining settings affect how easily the composite can be machined. By analyzing the results from the DOE, it can optimize the machining parameters for efficient and cost-effective processing. This work can lead to manufacturing innovation in the future.

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“…Aluminum alloys are employed as auxiliary structural metals second only to steel. Aluminum wrought materials are those aluminum products subjected to plastic deformation by secondary operations like hot and cold working processes. , Cast iron and steel parts can be replaced with metal matrix composites (MMCs), especially when aluminum is utilized as the basis material (Al) . As aluminum alloy offers low density, high specific strength, and a greater strength-to-weight ratio than ordinary Al alloy, it has recently drawn much attention for use in aerospace applications .…”

Section: Introductionmentioning

confidence: 99%

Nano-Sized Al₂O₃–Gr Reinforced Al7075 Hybrid Composite: Impact of Cooling Agents on Mechanical, Wear, and Fracture Behavior

Erappa Rajj,

Nagaral,

Chintakindi

et al. 2024

ACS Omega

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Aluminum metal cast composites (AMCCs) are frequently used in high-tech sectors such as automobiles, aerospace, biomedical, electronics, and others to fabricate precise and especially responsible parts. The mechanical and wear behavior of the metal matrix composites (MMCs) is anticipated to be influenced by the cooling agent's action and the cooling temperature. This research paper presents the findings of a series of tests to investigate the mechanical, wear, and fracture behavior of hybrid MMCs made of Al7075 reinforced by varying wt % of nano-sized Al 2 O 3 and Gr and quenched with water and ice cubes. The heat-treated Al7075 alloy hybrid composites were evaluated for their hardness, tensile, and wear behavior, showcasing a significant process innovation. The heat treatment process greatly improved the hybrid composites' mechanical and wear performance. The samples quenched in ice attained the highest hardness of 119 VHN. There is a 45.37% improvement in the hardness of base alloy with the addition of 3% of Al 2 O 3 and 1% of graphite particles. Further, the highest tensile and compression strengths were found in the ice-quenched 3% Al 2 O 3 and 1% graphite hybrid composites with improvements of 34.2 and 48.83%, respectively, compared to the water-quenched base alloy. Under the samples quenched in ice, the mechanical and wear behavior improved. The tensile fractured surface showed voids, particle pullouts, and dimples. The worn-out surface of wear test samples of the created hybrid composite had micro pits, delamination layers, and microcracks.

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Grinding and lapping induced surface integrity of silicon wafers and its effect on chemical mechanical polishing

Cited by 109 publications

References 39 publications

Assessing the Performance of Transition Metals (M = Hf, Ti, and Zr) Decorated Silicon Carbide Nanotubes (M@SiCNTs) for Hydrogen Storage Applications: Insights from Theoretical Calculations

Assessing the Performance of Transition Metals (M = Hf, Ti, and Zr) Decorated Silicon Carbide Nanotubes (M@SiCNTs) for Hydrogen Storage Applications: Insights from Theoretical Calculations

Tribological impact on borosilicate glass powder reinforced Al-MMC by variation of sliding velocity and the study of its machinability

Nano-Sized Al₂O₃–Gr Reinforced Al7075 Hybrid Composite: Impact of Cooling Agents on Mechanical, Wear, and Fracture Behavior

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Grinding and lapping induced surface integrity of silicon wafers and its effect on chemical mechanical polishing

Cited by 109 publications

References 39 publications

Assessing the Performance of Transition Metals (M = Hf, Ti, and Zr) Decorated Silicon Carbide Nanotubes (M@SiCNTs) for Hydrogen Storage Applications: Insights from Theoretical Calculations

Assessing the Performance of Transition Metals (M = Hf, Ti, and Zr) Decorated Silicon Carbide Nanotubes (M@SiCNTs) for Hydrogen Storage Applications: Insights from Theoretical Calculations

Tribological impact on borosilicate glass powder reinforced Al-MMC by variation of sliding velocity and the study of its machinability

Nano-Sized Al2O3–Gr Reinforced Al7075 Hybrid Composite: Impact of Cooling Agents on Mechanical, Wear, and Fracture Behavior

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Nano-Sized Al₂O₃–Gr Reinforced Al7075 Hybrid Composite: Impact of Cooling Agents on Mechanical, Wear, and Fracture Behavior