2023
DOI: 10.21203/rs.3.rs-3542797/v1
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Growing of perfect single-crystal epitaxial films of (Si 2 ) 1-x (GaN) x solid solutions on Si (111) substrates from the liquid phase

Dadajon Saparov,
A. S. Saidov,
Sh. N. Usmonov
et al.

Abstract: The technological capabilities of the method of liquid-phase epitaxy from a limited volume of Sn solution-melt for obtaining films of substitutional solid solution (Si2)1−x(GaN)x on Si (111) substrates are shown. The grown films had a single-crystal structure with (111) orientation, n-type conductivity with a resistivity of ρ ~ 1.38 Ω∙cm, a carrier concentration of n ~ 3.4∙1016 cm− 3, and a charge carrier mobility of µ ~ 133 cm2/(V⋅sec). The relatively narrow width (FWHM = 780 arcsec) and high intensity (2⋅105… Show more

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