Growing parameters and quality of ZnO seed-layer film (Part 1)

Abstract

The results of deposition of ZnO seed-layer on the silicon substrate, Al-coated silicon and Al-coated lithium niobate substrates by sol-gel method at sol concentration of 0,8 and 1,2 M were introduced. It was shown that film roughness and grain size had increased with increasing of the sol concentration. The new results of synthesis of ZnO vertically oriented nanorods on the obtained thin seed-layer on the silicon substrate by hydrothermal method were presented. The diameter and density of synthesized ZnO nanorods were defined, the dependence between such geometrical parameters and seed-layer properties was shown. The obtained results could be applied for design of acoustic wave sensors and nanoscale devices. References 5, figures 5.